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Double FP-cavity optical fiber acoustic sensing probe and sensing system thereof

A sensing probe and sensing system technology, applied in the direction of sensors, sensor parts, electrical components, etc., can solve the problems of not reducing the difficulty of the optical fiber FP cavity sensitive head, the process has no advantages, the signals are no longer orthogonal, etc., and the cost is achieved Low, simple structure, high sensitivity effect

Active Publication Date: 2015-06-10
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are several problems with the dual-wavelength method: 1) wide-spectrum light sources or dual LD ​​light sources and wavelength division multiplexers are required, resulting in high system cost, 2) the interference caused by optical phase It can be seen that the phase is inversely proportional to the wavelength λ, so for different cavity lengths, the wavelength difference of the two orthogonal wavelengths is different, so for a large cavity length change, the signals will no longer be orthogonal, and the measurement error will increase. Even failure, 3) Since the phase is inversely proportional to the wavelength, a certain cavity length is required for the designed orthogonal wavelength, which does not reduce the difficulty of making the optical fiber FP cavity sensitive head, and has no advantage in technology

Method used

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  • Double FP-cavity optical fiber acoustic sensing probe and sensing system thereof
  • Double FP-cavity optical fiber acoustic sensing probe and sensing system thereof
  • Double FP-cavity optical fiber acoustic sensing probe and sensing system thereof

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Embodiment 1

[0058] like figure 1 Shown is a double FP-cavity optical fiber acoustic sensor probe structure implemented according to the present invention, including: a diaphragm 1 sensitive to acoustic signals, light guide units 2 and 3 as optical fibers, an upper structure 12 and a lower structure 13 . The diaphragm 1 is mounted on the front end of the upper structure 12 . The light guide units 2 and 3 are installed in the lower structure body 13 , and the lower ends of the light guide units 2 and 3 are light input ends. The lower structure body 13 is placed in the accommodation space of the upper structure body 12, and the upper end surface 201 of the light guide unit 2 installed in the lower structure body 13 and the upper end surface 301 of the light guide unit 3 respectively form an FP cavity with the reflective surface 101 of the diaphragm 1 , the height difference between the end face 201 and the end face 301 is an odd multiple of one-eighth of the working light wavelength; a lock...

Embodiment 2

[0060] like Figure 4 Shown is a dual-FP-cavity optical fiber acoustic sensor probe structure using MEMS technology according to an embodiment of the present invention, including: a diaphragm 1 sensitive to acoustic signals, light-transmitting optical fibers 202 and 302, a silicon wafer structure 19, and a glass structure Body 20. The diaphragm 1 is located at the front end of the silicon wafer structure 19, and is made of silicon material or deposited silicon nitride material; the upper surface of the glass structure 20 is etched along the symmetrical center line to form two planes 201 and 301 with different heights, and the planes 201 and 301 The height difference is an odd multiple of one-eighth of the wavelength of the working light. A pit is made in the center of the lower surface of the glass structure 20, and the light-transmitting optical fibers 202 and 302 are placed in the pit and fixed with glue with a similar refractive index; wherein the light-transmitting optica...

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Abstract

The invention provides a double FP-cavity optical fiber acoustic sensing probe and a sensing system thereof. By arranging two FP cavities whose length difference is odd times of an one-eighth working light wavelength, and eliminating the problem of operating point drift by processing two orthogonal signals acquired through utilizing the two FP cavities, the double FP-cavity optical fiber acoustic sensing probe and the sensing system thereof are characterized by good stability, high sensitivity, electromagnetic interference resistance, and the like; and the double FP-cavity optical fiber acoustic sensing probe and the sensing system thereof can be widely applied to the fields of voice communication, environmental noise monitoring, noise source locating, acoustic signal pickup in complex electromagnetic environments, and the like.

Description

technical field [0001] The invention relates to the technical field of acoustic sensors, in particular to a double FP cavity optical fiber acoustic sensing probe and a sensing system thereof. Background technique [0002] In recent years, with the development of fiber optic sensing technology, fiber optic sensing technology has also achieved considerable development, forming a variety of fiber optic sensors, such as fiber optic vibration sensors, fiber optic acoustic sensors, fiber optic pressure sensors, fiber optic temperature sensors, etc. These fiber optic sensors There are also many principles used, such as reflection intensity type, fiber grating type, Mickelson interferometer, M-Z interferometer, Signac interferometer, and FP cavity fiber optic microphone. Because the optical fiber sensor adopts optical fiber sensing technology, it has the advantages of high sensitivity and anti-electromagnetic interference, and is suitable for complex electromagnetic environments and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04R23/00
Inventor 程进逯丹凤祁志美
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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