Optical fiber microelectronic pressure sensor for mechanical system and multiplexing structure thereof
A micro-electromechanical and system pressure technology, which is applied in the direction of force measurement by measuring the change of optical properties of materials when they are stressed, can solve problems such as the influence of sensor output sensitivity, the inability to achieve distributed pressure measurement, etc., to avoid residual pressure. Stress instability, high speed, and simple detection of the effect of the optical path
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[0041] Since the borosilicate glass 12 and the single crystal silicon film 14 are bonded together by a vacuum anodic bonding process, the internal pressure of the Fabry-Perot cavity is approximately equal to the ambient pressure in the vacuum anodic bonding chamber, so it can be regarded as absolute The reference pressure of the pressure sensor.
[0042] The light of wavelength λ is coupled into the Fabry-Perot cavity through an optical fiber. The light reflects back and forth on the upper surface of the borosilicate glass and the lower surface of the single crystal silicon film to form multi-beam interference. When the single crystal silicon film 14 is pressed, it will Bending causes the length L of the Fabry-Perot cavity to become L′. According to the principle of multi-beam interference of the Fabry-Perot cavity, for the light of wavelength λ, the intensity of the interference light will change, resulting in the wavelength The reflectance of lambda light changes. In the next du...
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