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Optical fiber microelectronic pressure sensor for mechanical system and multiplexing structure thereof

A micro-electromechanical and system pressure technology, which is applied in the direction of force measurement by measuring the change of optical properties of materials when they are stressed, can solve problems such as the influence of sensor output sensitivity, the inability to achieve distributed pressure measurement, etc., to avoid residual pressure. Stress instability, high speed, and simple detection of the effect of the optical path

Inactive Publication Date: 2005-06-29
NANJING NORMAL UNIVERSITY
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Problems solved by technology

[0008] The above example uses LED as the light source, and the LED light source will drift with the temperature change, so the sensitivity of the sensor output will be affected
Moreover, this cavity length demodulation method is difficult to combine with multiplexing technology to form a distributed measurement network. It can only measure single-point pressure and cannot realize distributed pressure measurement.

Method used

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  • Optical fiber microelectronic pressure sensor for mechanical system and multiplexing structure thereof
  • Optical fiber microelectronic pressure sensor for mechanical system and multiplexing structure thereof
  • Optical fiber microelectronic pressure sensor for mechanical system and multiplexing structure thereof

Examples

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Embodiment Construction

[0041] Since the borosilicate glass 12 and the single crystal silicon film 14 are bonded together by a vacuum anodic bonding process, the internal air pressure of the Fabry-Perot chamber is approximately equal to the ambient air pressure in the vacuum anodic bonding chamber, so it can be used as an absolute Reference pressure for the pressure sensor.

[0042] The light of wavelength λ is coupled into the Fabry-Perot cavity through the optical fiber, and the light is reflected back and forth on the upper surface of the borosilicate glass and the lower surface of the single crystal silicon film to form multi-beam interference. When the single crystal silicon film 14 is under pressure, it will Bending occurs so that the cavity length L of the Fabry-Perot cavity becomes L′. According to the multi-beam interference principle of the Fabry-Perot cavity, for light with a wavelength of λ, the interference light intensity will change, resulting in a wavelength The reflectivity of λ ligh...

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Abstract

It is a light fiber micro-electron mechanical system pressure sensor and its complex structure. The said sensor end polished fiber end is connected with the boron and silicon underlay and their outer end is connected with the light fixed epoxide resin and there is monocrystalline silicon on the underlay. Its complex structure wide band light source is connected with the tunable filter controller and tunable filter. The output end of the filter is connected with the array wave-guide grating. The output end of the array wave-guide grating is separately connected with photoelectricity detector and sensor through fiber adapter, light single direction isolator and light fiber coupler.

Description

technical field [0001] The invention relates to a sensor multiplexing system for measuring pressure, which is mainly used for the measurement of absolute and relative pressure, and especially uses the dual-wavelength cavity length demodulation principle and multiplexing technology to measure multi-point pressure to realize distributed pressure measurement. Background technique [0002] With the continuous development of microelectronics technology and silicon-based microsensors, pressure sensors have rapidly developed towards miniaturization, high performance and suitable for mass production. The continuous development of optical fiber sensing technology makes the organic combination of optical multiplexing technology and optical fiber sensing technology, and realizes the distributed measurement of physical quantities. [0003] image 3 It is a brief structural illustration of the fiber optic MEMS pressure sensor commonly used at present. Published in...

Claims

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Application Information

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IPC IPC(8): G01L1/24
Inventor 王鸣李明王婷婷聂守平
Owner NANJING NORMAL UNIVERSITY
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