MEMS accelerometer reading circuit

A technology of accelerometer and readout circuit, which is applied in the field of MEMS micro-inertial instruments, can solve the problems of uncertain DC offset, small structure of MEMS capacitive micro-accelerometer, and difficult test circuit, etc., to achieve the effect of solving DC offset

Active Publication Date: 2015-06-17
JIAXING NAJIE MICROELECTRONICS TECH
View PDF9 Cites 9 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The structure of the MEMS capacitive micro accelerometer is small, the output signal is very weak, and it is an analog signal, and the capacitance change is very small, generally within 10 -15 It is around F, and it is seriously affected by parasitic capacitance and various noises. It is very difficult to test this output signal and convert this signal into an electrical signal.
Moreover, MEMS accelerometers

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • MEMS accelerometer reading circuit
  • MEMS accelerometer reading circuit
  • MEMS accelerometer reading circuit

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0072] Such as figure 1 Shown, a kind of MEMS accelerometer readout circuit, it comprises: output module, described output module is the output conversion module of a differential output and single-ended output, and described output conversion module is the double-end differential signal detection processing structure ; The front-end detection amplifier module, the front-end detection amplifier module is an open structure; an internal temperature sensing module, the internal integrated temperature transmission module includes a temperature sensor and an operational amplifier, and the output terminal of the conversion output module is connected to the output terminal of the temperature sensor Connect the input terminal of the operational amplifier; a self-detection module, the self-detection module has a separate input terminal and an output terminal; include a calibration capacitor module, and the calibration capacitor module includes two precisely matched fixed capacitors; in...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention provides an MEMS accelerometer reading circuit which comprises an output module. The output module is an output conversion module including differential output and single-end output, and the output conversion module is of a two-end differential type signal detection and processing structure. A capacitance bridge is built outside, can be applicable to various accelerometer headers and solves the direct-current deviation problem. Circuit precision is high, and the resolution ratio of output signals is high.

Description

technical field [0001] The invention relates to the field of MEMS micro-inertial instruments, in particular to a MEMS accelerometer readout circuit. Background technique [0002] The structure of the MEMS capacitive micro accelerometer is small, the output signal is very weak, and it is an analog signal, and the capacitance change is very small, generally within 10 -15 F is about F, and it is seriously affected by parasitic capacitance and various noises. It is very difficult to detect this output signal and convert this signal into an electrical signal. Moreover, MEMS accelerometers change greatly with the integration process, and the device parameters have high uncertainty and various nonlinearities; the weak signal detection problem of its output has always been a prominent problem that plagues researchers. [0003] The existing MEMS accelerometer readout circuit structure has two kinds of single-ended detection structure and differential detection structure. [0004] S...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01P15/125
Inventor 李荣宽
Owner JIAXING NAJIE MICROELECTRONICS TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap