High-precision temperature measuring system based on micro resonator

Abstract

The invention provides a high-precision temperature measuring system based on a micro resonator, which comprises a micro resonator, a driving circuit, a frequency measuring circuit and a temperature calibration circuit, wherein the micro resonator is composed of a double-end fixedly supported tuning fork, a plate capacitor and a substrate, the driving circuit and the micro resonator form a closed-loop circuit, the micro resonator is ensured to generate stable oscillation signals, the frequency measuring circuit measures the signal frequency changing along with the temperature, a current environment temperature value is converted through the temperature calibration circuit. According to the micro resonator in the high-precision temperature measuring system, the double-end fixedly supported tuning fork is driven by the plate capacitor, thereby being high in sensitivity and good in linearity, and having very high measurement accuracy.

Description

technical field [0001] The invention belongs to the field of temperature measurement, in particular to a high-precision temperature measurement system based on a micro-resonator. Background technique [0002] With the development of science and technology, the requirements for temperature measurement and control are getting higher and higher, especially for high-precision and high-resolution temperature measuring instruments. Although the technology of temperature sensors on the market, such as thermocouples, thermal resistance and radiation thermometers, is very mature, these traditional temperature measuring instruments still cannot meet the temperature measurement accuracy requirements in some fields. [0003] A microresonator is a typical microsystem (MEMS) device with a wide range of applications. It has the characteristics of small size, low cost, impact resistance, and mass processing. Chinese patent CN101859155A discloses a temperature control system based on a mic...

AI Technical Summary

Problems solved by technology

The drive capacitor and detection capacitor in this patent adopt comb-tooth capacitors, the comb-tooth capacitors are small, and the parasitic capacitance of the resonator is large, so the signal-to-noise ratio is low, resulting in low measurement accuracy, about 0.01°C

In addition, comb-tooth electrodes are easily affected by processing errors. When the gap error on both sides of the movable comb is large, under the action of electrostatic force, the moving and static combs of the resonator will fit together, resulting in structural failure.

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