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Pressure sensor comprising a cover layer

A pressure sensor, covering technology, applied in the direction of measuring fluid pressure, measuring fluid pressure through electromagnetic elements, instruments, etc., can solve the problem that the sensor element cannot measure the optimal pressure and temperature at the same time, and achieves error reduction, high working temperature, The effect of isolation optimization

Active Publication Date: 2015-07-01
EHNDRESS KHAUZER GMBKH KO KG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, these sensor elements cannot be optimally used for pressure and temperature measurement at the same time

Method used

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  • Pressure sensor comprising a cover layer
  • Pressure sensor comprising a cover layer

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Embodiment Construction

[0028] Reference signs and their meanings are listed in the list of reference signs. Generally, the same reference numerals designate the same parts.

[0029] figure 1 A schematic diagram showing a cross-sectional view of a pressure sensor 1 comprising a substrate 2 in which a thin curved tab 3 is formed, for example by an etching process. For most applications, the measuring diaphragm 3 and the substrate 2 are silicon.

[0030] The upper surface of the pressure sensor 1 is provided with a cover layer 4 with contact elements 5 , 6 , 7 and 8 . In an example form of embodiment, an insulating layer 9 is provided between the substrate 2 and the cover layer 4 in order to electrically isolate the cover layer 4 from the substrate 2 . For example, insulating layer 9 is oxide or oxide-nitride. The cover layer 4 is divided into a first resistive region 10 and a second resistive region 11 . For example, the cover layer 4 is divided using a photolithography method and / or an etching p...

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PUM

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Abstract

The invention relates to a pressure sensor (1) comprising a substrate (2) having a formed measuring membrane (3) and an electrically conductive cover layer (4) which comprises electrical contact elements (5, 6, 7, 8) and which is electrically insulated in relation to the substrate (2) by means of an insulating layer (9). The cover layer (4) is structured such that in two regions (10, 11), that are electrically insulated from one another, two independent measurements of the respective resistance between two contact elements (5, 6, 7, 8) are possible. The regions (10, 11) of the cover layer (4) serve for shielding the sensor elements (12, 13) of the measuring membrane (3) from electromagnetic influences from the outside, for detecting damage to the measuring membrane (3) as well as for the exact temperature determination.

Description

technical field [0001] The invention relates to a pressure sensor comprising: a substrate having formed therein a thin flexure and an integrated measuring element; and an electrically conductive cover layer having electrical contact elements electrically isolated from the substrate by an insulating layer. Background technique [0002] Pressure sensors are often implemented as semiconductor sensors. Typically, they are based on silicon. In this case, the pressure sensor chip can be formed in a simple manner and generally consists of a substrate and a thin curved sheet formed therein by microfabrication techniques and having an integrated measuring element. Pressure on a thin curved sheet can produce a pressure-dependent deflection. An integrated measuring cell responds to a change in electrical resistance, which is recorded as an electrical measurement signal. This provides a signal for additional processing and evaluation. [0003] In general, the sensor element is embod...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/00
CPCG01L9/0052G01L9/0042G01L9/065G01L9/085
Inventor 本杰明·莱姆克雷涅·齐尔曼塞巴斯蒂安·波贝林拉尔夫·罗德
Owner EHNDRESS KHAUZER GMBKH KO KG