Atomic force microscope scanning thermal probe and preparation method thereof

Abstract

The invention discloses an atomic force microscope scanning thermal probe and a preparation method thereof. The obtained atomic force microscope scanning thermal probe comprises a probe cantilever, a probe tip, a graphene thin film layer and a low thermal conductivity layer, and the thermal conductivity of the low thermal conductivity layer ranges from 0.2 W/mK to 2 W/mK; the probe tip is located at one end of the probe cantilever, and the probe tip is coated with the graphene thin film layer which is coated with the low thermal conductivity layer, only the portion, corresponding to a probe tip body, of the graphene thin film layer is coated with the low thermal conductivity layer, and the portion, corresponding to the point of the probe tip, of the graphene thin film layer is not coated with the low thermal conductivity layer. By means of the atomic force microscope scanning thermal probe and the preparation method thereof, the accuracy and the resolution ratio of atomic force microscope thermal tests can be improved.

Description

【Technical field】 [0001] The invention relates to the field of atomic force microscopes, in particular to an atomic force microscope scanning thermal probe and a preparation method thereof. 【Background technique】 [0002] The atomic force microscope uses the interaction force between atoms and molecules to accurately image the surface topography of the material. When the probe tip approaches the sample surface, the interaction force between the two causes the cantilever to bend. The four-quadrant photodetector is used to detect the bending , the magnitude of the force can be calculated using Hooke's law, and the surface morphology of the sample can be inferred from the force the probe bears at different scanning points. Since its invention in 1986, from the initial morphological characterization to the current mechanical, electrical, magnetic, and thermal characterization, the functions have been quite complete, and have been used in many disciplines such as physics, chemist...

AI Technical Summary

Problems solved by technology

However, the existing scanning thermal probe of the atomic force microscope has the problem of large error and low accuracy when measuring the thermal properties of the sample.

When there is a water film on the contact surface between the probe and the sample, the error is greater, and the spatial resolution of the test is also severely reduced

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