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Elastic wave device

An elastic wave device, elastic wave resonator technology, applied in impedance network, transformer, electrical components and other directions, can solve the problems of inductance deviation, reduction of the 9Q value of the inductor electrode, etc.

Active Publication Date: 2015-07-08
SKYWORKS PANASONIC FILTER SOLUTIONS JAPAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In the conventional elastic wave device 1, the Q value of the inductor electrode 9 decreases and the inductance thereof may vary

Method used

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Experimental program
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Effect test

Embodiment approach 1

[0029] Figure 1A is a schematic cross-sectional view of elastic wave device 21 in Embodiment 1 of the present invention. The elastic wave device 21 includes: a piezoelectric substrate 22; an interdigital transducer (IDT) electrode 23 arranged on the upper surface 22U of the piezoelectric substrate 22; a wiring electrode 24 arranged on the upper surface 22U of the piezoelectric substrate 22; The side wall 25 arranged on the upper surface 22U of the piezoelectric substrate 22; the top electrode 27 arranged on the upper surface 25U of the side wall 25; the insulator 28 covering the side wall 25 and the top electrode 27; arranged on the upper surface of the insulator 28 The resin layer 33 on 28U; the inductor electrode 29 provided on the upper surface 33U of the resin layer 33; the insulator 30 covering the upper surface 33U of the resin layer 33 and the inductor electrode 29; terminal electrode 31 ; and connection electrode 32 penetrating through insulators 28 , 30 and resin la...

Embodiment approach 2

[0056] Figure 3A It is a schematic cross-sectional view of elastic wave device 111 in Embodiment 2 of the present invention. The elastic wave device 111 includes: a piezoelectric substrate 112; a plurality of interdigital transducer (IDT) electrodes 113 arranged on an upper surface 112U of the piezoelectric substrate 112; and wiring electrodes arranged on the upper surface 112U of the piezoelectric substrate 112. 114; the side wall 115 disposed on the upper surface 112U of the piezoelectric substrate 112; the adhesive layer 117 disposed on the upper surface 115U of the side wall 115; the top plate electrode 118 disposed on the upper surface 117U of the adhesive layer 117; The insulator 119 provided on the upper surface 112U of the piezoelectric substrate 112; the inductor electrode 120 arranged on the upper surface 119U of the insulator 119; the insulator 121 arranged on the upper surface 119U of the insulator 119; the upper surface of the insulator 121 arranged terminal ele...

Embodiment approach 3

[0089] Figure 4 It is a circuit diagram of elastic wave device 191 in Embodiment 3 of the present invention. Figure 5 is a schematic cross-sectional view of the elastic wave device 191 . exist Figure 4 and Figure 5 In the drawings in Embodiment 3, for and Figure 3A The same components of the elastic wave device 111 in the second embodiment shown are given the same reference numerals.

[0090] like Figure 4 As shown, the elastic wave device 191 is a duplexer including a transmission filter 129 and a reception filter 130 . The input and output terminals of the transmission filter 129 are an unbalanced transmission-side signal terminal 135A, a transmission-side ground terminal 135B, and an antenna terminal 135C. The input and output terminals of the reception filter 130 are a balanced reception-side signal terminal 135D, a reception-side ground terminal 135E, and an antenna terminal 135C. In the reception filter 130, two longitudinally coupled resonator-type elastic ...

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Abstract

An elastic wave device includes a piezoelectric substrate, an IDT electrode disposed on the piezoelectric substrate, a wiring electrode disposed on the piezoelectric substrate and connected to the IDT electrode, a first insulator disposed on the piezoelectric substrate to seal the IDT electrode and the wiring electrode, a resin layer provided on the first insulator, an inductor electrode disposed on the resin layer, a second insulator disposed on the resin layer to cover the inductor electrode, a terminal electrode disposed on the second insulator, and a connecting electrode passing through the first insulator, the second insulator, and the resin layer to electrically connect the wiring electrode, the terminal electrode, and the inductor electrode. The first insulator includes a resin and filler dispersed in the resin. A density of filler in the resin layer is smaller than an average density of the filler in the first insulator. This elastic wave device has excellent characteristics of the inductor while reducing variations of the characteristics.

Description

[0001] This application is a divisional application of the invention patent application 201180009464.3 with the filing date on December 14, 2011 and titled "Elastic Wave Device". Application PCT / JP2011 / 006977. technical field [0002] The present invention relates to elastic wave devices used in mobile communication equipment and the like. Background technique [0003] Figure 8 is a schematic cross-sectional view of a conventional elastic wave device 1 . The elastic wave device 1 includes: a piezoelectric substrate 2; an interdigital transducer (IDT) electrode 3 arranged on the piezoelectric substrate 2; a wiring electrode 4 arranged on the piezoelectric substrate 2 and connected to the IDT electrode 3; The side wall 5 on the piezoelectric substrate 2 and surrounding the periphery of the IDT electrode 3; the top plate 7 arranged on the side wall 5 so as to cover the space 6 on the IDT electrode 3; the insulator 8 covering the side wall 5 and the top plate 7; configuration ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/05H03H9/10H03H9/145H03H9/72
CPCH03H9/0057H03H9/1071H03H9/725H03H9/059H03H9/0576H03H9/0547H03H9/14588H01F38/14H03H9/12H03H9/64
Inventor 中山英明鹰野敦古川光弘
Owner SKYWORKS PANASONIC FILTER SOLUTIONS JAPAN
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