ICP (inductively coupled plasma) processing machine tool cavity air pressure control method based on PLC (programmable logic controller)

Abstract

The invention discloses an ICP (inductively coupled plasma) processing machine tool cavity air pressure control method based on a PLC (programmable logic controller), and belongs to the technical field of plasma processing machine tools. In order to overcome various defects that reaction gas is directly discharged into the atmosphere by virtue of previous plasma machine tools, the ICP processing machine tool cavity air pressure control method is disclosed aiming at maintaining the stability of machine tool cavity pressure and preventing the pressure change from influencing processing results in a machine tool processing procedure; and after processing, residual reaction gas in a machine tool cavity and gas obtained after reaction can be pumped and discharged; and then further tail gas treatment can be performed to prevent environmental pollution and damages to the health of operators.

Description

technical field [0001] The invention belongs to the technical field of plasma processing machine tools, and relates to a PLC-based method for controlling the cavity air pressure of an ICP plasma processing machine tool. Background technique [0002] The processing of glass mirror by ICP plasma machine tool can ensure the removal of subsurface damage and micro cracks without changing the surface accuracy, so that the glass mirror can achieve better processing effect and meet its specific use conditions. [0003] Plasma processing needs to pass the plasma reaction gas into the plasma reaction torch. Plasma processing needs to pass through oxygen, argon and carbon tetrafluoride, and then use radio frequency power to generate inductive coupling in the rectangular tube, and then form a plasma flame pair The workpiece is processed; in the past, the plasma machine tool used a large air pump to pump the reaction gas and the reacted gas out of the machine tool, and directly discharge...

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the various disadvantages of the previous plasma machine tool that directly discharges the reaction gas into the atmosphere, including the problems of polluting the environment and endangering the health of the operator, the present invention provides a method for controlling the cavity air pressure of the ICP plasma processing machine tool based on PLC. The plasma processing machine tool controls the pressure of the machine tool cavity during processing, and exhausts the remaining gas in the machine tool cavity after processing to prevent environmental pollution and damage to the health of operators

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