Horizontal continuous magnetron sputtering film plating machine online panel constant-temperature heating apparatus

Abstract

The present invention discloses a horizontal continuous magnetron sputtering film plating machine online panel constant-temperature heating apparatus, wherein a conveying base plate is horizontally provided with a copper conducting plate, the copper conducting plate is provided with an embedded thermocouple temperature measuring rod and a PTC constant-temperature low-voltage heating element, the embedded thermocouple temperature measuring rod and the PTC constant-temperature low-voltage heating element are respectively and correspondingly connected to the copper disk electrodes on the conveying base plate, the bottom portion of a vacuum chamber is provided with rotary electric conduction wheel electrodes, the rotary electric conduction wheel electrodes comprise a group of power supply electrodes and a group of temperature measuring electrodes, and when the copper disk electrodes and the rotary electric conduction wheel electrodes correspondingly contact and are electrically connected, real-time temperature detection and heating control are performed. With the apparatus of the present invention, the problem of the difficult heating on the panel to be plated in the vacuum chamber of the continuous magnetron sputtering film plating is overcome, the film plating qualities of the transparent electric conduction film, the antireflection film and the high reflection film of the plated display panel are increased, and the apparatus is suitable for increasing of the film plating quality of the transparent electric conduction film, the antireflection film and the high reflection film of the display panel.

Description

technical field [0001] The invention relates to an online panel constant temperature heating device of a horizontal continuous magnetron sputtering coating machine, in particular to a device for heating the panel to be coated when it enters each chamber of the vacuum chamber during horizontal vacuum sputtering coating. The utility model relates to a device for heating a panel to be plated, ensuring a constant temperature of the panel, detecting the temperature in real time and controlling the heating, belonging to the field of mechanical technology. Background technique [0002] Anti-reflective conductive film is a metal compound with good transparent and conductive properties. It has the characteristics of band gap, high light transmittance in the visible spectrum region and low resistivity. It is widely used in flat panel display devices, solar cells, and special function window coatings. It is the only transparent conductive electrode material for LCD, PDP, OLED, touch sc...

AI Technical Summary

Problems solved by technology

In order to better meet this process, the vertical magnetron coating machine adopts glass heating and infrared heating, which is simple in design and meets the needs of the process, but there are some problems in itself, which lead to low quality of anti-reflective conductive film coating and low production capacity.

Many companies use horizontal continuous magnetron coating machines to better overcome the above problems, but there is a bottleneck in uniform heating on the panel before the anti-reflective conductive film

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