vacuum equipment

A vacuuming equipment, low vacuum technology, applied in mechanical equipment, liquid variable capacity machinery, pump control and other directions, can solve the problems of inability to guarantee the yield, reduce system sealing, system air leakage, etc. The effect of cleaning and cleaning, unobstructed gas flow, and improved safety performance

Active Publication Date: 2018-02-06
CHANGZHI CITY HUAJIE GUANG TECH CO LTD
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Problems solved by technology

[0002] With the high development of modern science and technology, the sealed containers used in industry, commerce, science and research institutions are getting bigger and bigger. Since the manufacturing process cannot be perfect and there are thousands of sealing points, the sealing device may inevitably leak. , in the process of production and development, the equipment often has problems in material quality, installation, component fatigue and structural design, which reduces the sealing of the system, causes air leakage in the system, causes the workpiece to be oxidized and scrapped, and affects industrial production. At the same time, traditional equipment The accuracy is low and the yield cannot be guaranteed

Method used

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Embodiment Construction

[0024] like figure 1 As shown, the vacuum equipment of the present invention includes a vacuum chamber 1, a process system 2, a vacuum breaking system 3, a low vacuum system 4 and a high vacuum system 5, and the low vacuum system 4 includes a first low vacuum pump 41 and a low vacuum pump 41. meter 42, the first low-vacuum pump 41 and the low-vacuum gauge 42 are connected to the vacuum chamber 1 through pipelines, and a first electromagnetic valve 43 is arranged between the first low-vacuum pump 41 and the vacuum chamber 1, A first isolation valve 44 is provided between the low vacuum gauge 42 and the vacuum chamber 1;

[0025] The high vacuum system 5 includes a high vacuum pump 51 and a high vacuum gauge 52, the high vacuum pump 51 and the high vacuum gauge 52 are all connected to the vacuum chamber 1 through pipelines, and the high vacuum pump 51 is connected to the vacuum chamber 1 A second solenoid valve 53 is arranged between them, a second isolation valve 54 is arrange...

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Abstract

The vacuum equipment of the present invention belongs to the technical field of vacuum equipment; the technical problem to be solved is to provide vacuum equipment, improve the structural design of the vacuum system through work practice, add filter valves, reduce the impact of gas internal residues on high-pressure vacuum pumps, and add The low vacuum gauge and high vacuum gauge accurately measure the inside of the system to control the accuracy of the equipment. At the same time, the multi-valve series connection method is used to ensure the stability of the intake air, and the appropriate sealing method is selected to improve the sealing performance of the vacuum system, thereby reducing the air leakage of the system. efficiency and improve equipment safety performance; the technical solution adopted is: vacuum equipment, including vacuum chamber, process system, vacuum breaking system, low vacuum system and high vacuum system, and each system is connected with the vacuum chamber to realize low vacuum , high vacuum, process air intake and vacuum breaking; the invention can be widely used in the technical field of vacuum equipment.

Description

technical field [0001] The vacuum equipment of the invention belongs to the technical field of vacuum equipment. Background technique [0002] With the high development of modern science and technology, the sealed containers used in industry, commerce, science and research institutions are getting bigger and bigger. Since the manufacturing process cannot be perfect, there are thousands of sealing points, and the sealing device inevitably has the possibility of leakage. , in the process of production and development, the equipment often has problems in material quality, installation, component fatigue and structural design, which reduces the sealing of the system, causes air leakage in the system, causes the workpiece to be oxidized and scrapped, and affects industrial production. At the same time, traditional equipment The accuracy is low and the yield cannot be guaranteed. Contents of the invention [0003] The present invention overcomes the deficiencies in the prior ar...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B37/14F04B49/22F04B53/16F04B51/00F04B53/00
Inventor 袁建清
Owner CHANGZHI CITY HUAJIE GUANG TECH CO LTD
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