X ray grating imaging system

Abstract

The invention discloses an X-ray grating imaging system, the X-ray grating imaging system includes an X-ray light source, a multi-capillary X-ray source grating, a multi-capillary X-ray phase grating, a multi-capillary X-ray analysis absorption grating, and an X-ray detector; the X-ray light source is arranged on the inlet end of the multi-capillary X-ray source grating, the multi-capillary X-ray source grating is used to focus X-ray irradiated by the X-ray light source to obtain coherent light used for irradiation of a sample, the multi-capillary X-ray phase grating is arranged behind the sample, and is used to collect and modulate the X-ray after irradiation of the sample to produce diffraction self-imaging effect, the multi-capillary X-ray analysis absorption grating is arranged behind the multi-capillary X-ray phase grating, and the multi-capillary X-ray analysis absorption grating is used to collect and process the X-ray emitted from the multi-capillary X-ray phase grating to convert phase information in the phase grating into identifiable light intensity information, and the X-ray detector is arranged behind the multi-capillary X-ray analysis absorption grating, and used to detect and collect the information of the sample. Through use of the multi-capillary X-ray gratings with larger '' depth-width ratio'', the resolution of the X-ray grating imaging system can be improved, the production cost can be reduced, and the X-ray grating imaging system is easy to promote.

Description

technical field [0001] The invention relates to the technical field of optical imaging, in particular to an X-ray grating imaging system. Background technique [0002] At present, X-ray gratings have important applications in the fields of life, energy, environment, food, etc. Since X-ray gratings are very precise optical devices, they have high requirements for manufacturing technology, especially the production of high-quality two-dimensional X-ray gratings Therefore, how to make high-quality two-dimensional X-ray gratings has attracted the attention of relevant researchers. [0003] Existing methods for fabricating gratings mainly use mechanical scribing, holographic lithography, electron beam lithography, X-ray lithography and micro-plating techniques, etc., but the "aspect ratio" of the X-ray gratings produced by these methods is not Moreover, these methods have difficulties in fabricating two-dimensional high-energy X-ray gratings with a large "aspect ratio", because ...

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Problems solved by technology

[0003] Existing methods for fabricating gratings mainly use mechanical scribing, holographic lithography, electron beam lithography, X-ray lithography and micro-plating techniques, etc., but the "aspect ratio" of the X-ray gratings produced by these methods is not , and these methods have difficulties in fabricating two-dimensional high-energy X-ray gratings with a large "aspect ratio", because high-energy X-rays have stronger penetrating power than low-energy X-rays

Therefore, the existing X-ray gratings do not meet the requirements of all walks of life for large "aspect ratio" X-ray gratings

[0004] In addition, when the conventional X-ray absorption contrast imaging technology is used for X-ray imaging analysis of substances composed of carbon, hydrogen, oxygen and other elements, due to the low resolution, it cannot meet the actual needs

In addition, another key factor in the development of X-ray phase contrast imaging technology is how to obtain high-power coherent light. The ideal coherent light is synchrotron radiation light source, but synchrotron radiation is expensive and not easy to promote

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