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Spin coating preparation method for transparent diffraction film used for optical element

An optical element, transparent technology, applied in optical elements, optics, instruments, etc., can solve the problems of low diffraction efficiency of transparent film-based diffractive optical elements, uncontrollable film thickness, low surface accuracy, etc., to achieve good reproducibility , high consistency, high surface precision effect

Active Publication Date: 2015-08-12
BEIJING RES INST OF SPATIAL MECHANICAL & ELECTRICAL TECH
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AI Technical Summary

Problems solved by technology

[0005] The technical problem solved by the present invention is to overcome the deficiencies of the prior art and provide a spin-coating preparation method for transparent diffractive films for optical elements, which can solve the problems of low surface shape accuracy, uncontrollable film thickness, transparent film base, etc. Low Diffraction Efficiency of Diffractive Optical Elements

Method used

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  • Spin coating preparation method for transparent diffraction film used for optical element
  • Spin coating preparation method for transparent diffraction film used for optical element
  • Spin coating preparation method for transparent diffraction film used for optical element

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Embodiment Construction

[0021] Such as figure 1 As shown, it is the flow chart of the spin coating preparation of the transparent diffractive film of the present invention, which mainly includes cleaning the substrate, placing the substrate, gluing, standing still, uniform gluing, secondary gluing, secondary gluing, N times gluing, N times Uniform glue, standing for more than 48 hours, baking glue, peeling glue, etc. The operating equipment involved includes substrates with diffraction stripes, rotating platforms, measuring cups / droppers, transparent liquid polyimide, and glue baking machines.

[0022] Concrete preparation steps are as follows:

[0023] Step 1: Clean the substrate. In a thousand-class clean room, rinse the substrate with deionized water and dry it with nitrogen.

[0024] The substrate structure with diffraction fringes of the present invention is as figure 2 As shown, the substrate with diffraction fringes can be light and easily etched materials such as glass and aluminum plate, ...

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Abstract

Provided is a spin coating preparation method for a transparent diffraction film used for an optical element. The method mainly comprises steps of cleaning a substrate, placing the substrate, coating glue, statically placing, evenly dividing glue, coating glue for a second time, evenly dividing glue for a second time, coating glue for Nth time, evenly dividing glue for Nth time, statically placing for more than 48 hours, baking glue, and tearing off glue, etc. The method can be used for preparing multi-step or continuous step transparent film-based diffraction optical elements whose diameter is smaller than or equal to 300 mm, surface figure accuracy PV is smaller than 0.5 [mu]m, and thickness of the film is controllable. The method solves problems in a preparation process that surface figure accuracy is low, the thickness of the film is not controllable, and diffraction efficiency of the transparent film-based diffraction optical element is low.

Description

technical field [0001] The invention relates to a method for preparing a film layer for an optical element, which can be used for preparing a multi-step or continuous-step transparent film-based diffractive optical element with a diameter of ≤300mm, surface shape precision PV<0.5μm, and controllable film thickness. Background technique [0002] To achieve ultra-high resolution in optical remote sensors, a large-aperture optical primary mirror must be used. However, traditional optical glass lenses are constrained by conditions such as weight, processing, and testing. As the aperture of the optical system increases, the processing difficulty and cost will soar. [0003] The transparent film-based diffractive optical element is used as a space optical lens, which can meet the needs of ultra-high resolution technology for a large-aperture primary mirror. The transparent film-based diffractive optical element is light in weight, small in size, foldable and unfoldable, and ca...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/00G02B1/10
CPCG02B1/10
Inventor 张月焦建超王保华金建高苏云
Owner BEIJING RES INST OF SPATIAL MECHANICAL & ELECTRICAL TECH
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