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Method for manufacturing glass substrate for hard disks

A technology of glass substrate and manufacturing method, which is applied in the direction of manufacturing tools, manufacturing base layers, disc carrier manufacturing, etc., and can solve the problems of grinding film wear and hindering efficiency, etc.

Active Publication Date: 2015-08-12
HOYA CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] However, when the machining fluid described in Patent Document 2 is used as a grinding fluid, and the grinding fluid is used in a grinding process using a grinding film having fixed abrasive particles having an average particle diameter of less than 2.0 μm, although the grinding rate Improvement can be achieved to a certain extent, but the wear of the grinding film is serious, resulting in a problem that hinders efficiency

Method used

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  • Method for manufacturing glass substrate for hard disks
  • Method for manufacturing glass substrate for hard disks
  • Method for manufacturing glass substrate for hard disks

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0108] (1) Blank manufacturing process

[0109] A glass substrate 1.0 mm formed by a direct press method in which molten glass is poured into a lower die and press-molded by an upper die to obtain a disk-shaped glass substrate precursor was used. For this press-molded glass substrate precursor, a hole is drilled in the center of the glass substrate precursor using a core drill or the like equipped with a diamond grindstone or the like in the cutting portion, and the outer peripheral end surface and the inner peripheral end surface are ground so that the outer peripheral end surface and the inner peripheral end surface are ground. The diameter is 65 mm, and the inner diameter (the diameter of the circular hole at the center) is 20 mm.

[0110] (2) Rough grinding process (1st grinding process)

[0111] In the rough grinding process (1st grinding process), the mechanical method of grinding|polishing with free abrasive grains with the surface grinder (made by SpeedFam company) wa...

Embodiment 2 to 8

[0136] Grinding fluid 1 and its flow rate in the finishing grinding process (the 3rd grinding process) were changed to grinding fluid 2 to 8 and the flow rate shown in Table 3, respectively, and the glass was produced in the same manner as in Example 1. substrate.

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Abstract

The present invention relates to a method for manufacturing a glass substrate for hard disks, said method being characterized by comprising at least a roughly grinding step, a finely grinding step of carrying out a grinding procedure using diamond-fixed abrasive grains while flowing a grinding fluid, and a roughly polishing step, wherein the finely grinding step is carried out using a grinding sheet having, attached thereto, diamond-fixed abrasive grains having an average grain diameter of 0.5 μm or more and less than 2.0 μm, and wherein the grinding fluid contains at least an anionic surfactant and a nonionic surfactant having a molecular weight of 500 to 10000 in which the amount of the nonionic surfactant is more than 70 mass% relative to the total amount of the surfactants.

Description

technical field [0001] This invention relates to the manufacturing method of the glass substrate for hard disks (magnetic information recording medium) used as the magnetic disk mounted in a hard disk (HDD). Background technique [0002] In recent years, as the recording capacity of magnetic information recording media such as HDDs has increased in density and applications have expanded, glass substrates used as base materials thereof have been required to further improve the quality of the recording surface and further improve the strength thereof. [0003] For glass substrates for magnetic information recording media, in the presence of a grinding liquid called a coolant (coolant) having a surfactant or the like, a grinding film with fixed abrasive grains such as diamond particles is used to grind the original glass plate. Grinding is performed on a flat glass original plate obtained by a float method or a direct press method to adjust the thickness of the glass original p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11B5/84B24B37/04B24B37/08B24B7/17B24B7/22
CPCC03C19/00B24B37/042B24B37/08B24B7/17B24B37/00G11B5/8404G11B5/84B24B7/228C03C3/095
Inventor 原田圆央塚田和也
Owner HOYA CORP