Vacuum evaporation equipment

Abstract

The invention relates to the technical field of evaporation techniques, and discloses vacuum evaporation equipment which comprises a shell, wherein a main vacuum cavity and a side vacuum cavity are formed inside the shell; the side vacuum cavity is internally provided with a fault detection module for scanning a crucible to be tested, and a manipulator for taking and putting the crucible into the main vacuum cavity; a switch component is arranged between the main vacuum cavity and the side vacuum cavity; when the switch component is opened, the main vacuum cavity and the side vacuum cavity are communicated to take and detect the crucible; when the switch component is closed, the main vacuum cavity and the side vacuum cavity are isolated from each other. By adopting the vacuum evaporation equipment, on the premise that the vacuum degree of the main vacuum cavity is not damaged, the crucible can be detected on line, the fault detection module is adopted to detect the crucible so as to confirm whether the detected crucible has micro cracks, and the detection precision for the crucible is relatively high. By adopting the vacuum evaporation equipment, the service life of each crucible can be maximally prolonged, the time interval for replacing the crucibles in practical production can be prolonged, the production preparation time can be shortened, and furthermore the production cost can be lowered.

Description

technical field [0001] The invention relates to the technical field of evaporation, in particular to a vacuum evaporation equipment. Background technique [0002] At present, in the preparation process of bottom-emitting OLED, the preparation of metal cathode needs to be carried out in vacuum evaporation equipment. The vacuum evaporation equipment uses a crucible to hold the metal material to be evaporated. For example, the material of metal cathode in OLED is generally selected aluminum material. [0003] In the process of forming the metal cathode of OLED by vacuum evaporation, the molten aluminum has the characteristics of infiltrating the crucible. During the evaporation process, the molten aluminum easily crawls along the crucible wall and overflows the crucible, which leads to the easy solidification of aluminum during cooling. Adhesion of the crucible and nearby objects will cause the crucible to be damaged; moreover, the process temperature in the environment where ...

AI Technical Summary

Problems solved by technology

After the crucible is fired, the vacuum chamber is generally opened before refilling the material to ensure that there are no cracks, so that the crucible is exposed to the atmosphere for manual visual confirmation, resulting in frequent switching between the high temperature and low temperature states of the crucible. , which increases the risk of microcracks in the crucible; and, in the above-mentioned method of confirming whether microcracks have occurred in the crucible, the accuracy of human visual inspection is low, and the probability of error is high, which leads to a conservative estimate of the life of the crucible, and replacement in actual production Shorter time intervals for crucibles increase production lead time and increase production costs

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