Optical coupling device and method of forming the same

Abstract

Provided is an optical coupling device and a forming method thereof. The optical coupling device comprises a first semiconductor substrate, a first groove, a first reflecting layer, a second semiconductor substrate, a second groove, and a second reflecting layer. The first semiconductor substrate comprises a first surface and a second surface opposite to the first surface. The first groove is arranged in the first semiconductor substrate and passes through the first surface of the first semiconductor substrate. The sidewall of the first groove is provided with a first inclination angle. The first reflecting layer is arranged on the surfaces of the sidewall and the bottom of the first groove. The second semiconductor substrate comprises a third surface and a fourth surface opposite to the third surface. The second groove is arranged in the second semiconductor substrate and passes through the third surface of the second semiconductor substrate. The sidewall of the second groove is provided with a second inclination angle. The first inclination angle and the second inclination angle are mutually complementary. The second reflecting layer is arranged on the surfaces of the sidewall and the bottom of the second groove. The first surface of the first semiconductor substrate and the third surface of the second semiconductor substrate are bonded together in order that the first groove and the second groove correspond to each other. The optical coupling device improves coupling efficiency.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, and more to an optical coupling device and a forming method thereof. Background technique [0002] An optical waveguide is a guiding structure that transmits optical frequency electromagnetic waves composed of an optically transparent medium (such as quartz glass). The transmission principle of the optical waveguide is that the total reflection phenomenon of the electromagnetic wave confines the light wave to propagate in the waveguide and its surrounding limited area on the medium interface with different refractive indices. [0003] Among the many optical waveguide materials used in the communication band, silicon-on-insulator materials are easy to produce submicron low-loss optical waveguides due to their strong light confinement ability, and the preparation process is compatible with the fabrication process of microelectronic integrated circuits, which greatly The cost of preparing...

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Problems solved by technology

[0007] However, the coupling efficiency of the grating coupling technology in the prior art is low, which is not conducive to improving the performance of the optical waveguide device

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