Cleaning technology of graphite boat

Abstract

The invention discloses a cleaning technology of a graphite boat. The cleaning technology comprises the following specific steps: (1), a cleaning solution is configured, hydrofluoric acid is added into a stock solution, the volume concentration of the hydrofluoric acid is 20% to 25%, and ammonium hydroxide with the volume concentration of 1% is added; (2), the graphite boat is soaked in the configured cleaning solution for 4 hours to 8 hours, and bubbling is carried out through nitrogen; (3), clean water is used for cleaning the graphite boat; (4), an air gun is used for drying the cleaned graphite boat; and (5), drying is carried out, the graphite boat is put into a drying box to be dried, and the nitrogen is led into the drying box. The ammonium hydroxide is added into the cleaning solution to relieve the corrosion of the cleaning solution to the graphite boat, and the aims of prolonging the service life of the graphite boat and reducing the production cost of an enterprise are achieved.

Description

technical field [0001] The invention relates to the production field of crystalline silicon solar cells, in particular to a graphite boat cleaning process. Background technique [0002] At present, most commercial crystalline silicon solar cells use direct PECVD (tubular PE), using graphite boats as the carrier of silicon wafers, and silicon nitride is also deposited on the surface of graphite boats during the production process. The increase in the accumulation of silicon nitride also affects the uniformity of the silicon wafer coating. Therefore, the graphite boat needs to be cleaned after 150 times of use to reduce the occurrence of defective products. However, the existing process only uses HF, and the initial liquid concentration is about 10%-25%, to clean the graphite boat. This kind of cleaning liquid will cause certain corrosion to the graphite boat every time, which greatly reduces the graphite boat. The service life also causes an increase in the production cost o...

AI Technical Summary

Problems solved by technology

However, the existing process only uses HF, and the initial concentration of the solution is between 10% and 25%. The graphite boat is cleaned. This kind of cleaning solution will cause certain corrosion to the graphite boat every time, which greatly reduces the graphite boat. The service life also causes an increase in the production cost of the enterprise