Ion source fast-connection scalable water-cooled Langmuir double probe
An ion source and dual-probe technology, applied in the direction of plasma, electrical components, etc., to achieve the effect of easy replacement
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[0017] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0018] Such as Figure 1-5 As shown, a kind of ion source quick-connect scalable water-cooled double Langmuir probe includes probe core 15, probe tube 13, flange seat 4, ceramic seat 16, one end of probe tube 13 and flange The seat 4 is brazed together, and the end of the probe tube 13 is also brazed with cooling water inlet and outlet pipes 5, 6, the probe core 15 and the ceramic seat 16 are welded together, and the ceramic seat 16 is screwed on the probe tube 13 Above, the probe tube 13 is provided with a cooling water tank 14 communicating with the cooling water inlet and outlet pipes 5 and 6, two Teflon wires 7 are built in the probe tube 13, and the flange seat 4 passes through the clamp 3 and The sealing ring 2 is sealed and fixed with two flange electrodes 1, one end of the two flange electrodes 1 extends into the probe tube 13 and is connected ...
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