Adjustable device for atmospheric pressure low-temperature plasma jet arrays

Abstract

The invention provides an adjustable device for atmospheric pressure low-temperature plasma jet arrays. Single plasma generators are fixed with stud sleeves through cementation; the stud sleeves and a box body are in threaded connection, and sealing silicone grease is used for lubricating and sealing at the joints of screws; working gas is introduced into the upper end of the box body, and uniformly flows into the plasma generators through filtering screen meshes; the stud sleeves can be adjusted up and down relative to the position of the box body by screwing the stud sleeves, and thus the plasma generators can be driven to be adjusted up and down; the adjusting distance can be calculated through a screwing number of turns and a screw pitch; various combined adjustments of the plasma jet arrays can be realized by adjusting the up-and-down positions of the single plasma generators, and the adjustable device is suitable for different array forms of existing linear arrays and annular arrays. According to the adjustable device, the up-and-down positions of the plasma generators can be adjusted according to practical requirements, and the application flexibility and processing accuracy of the plasma jet arrays are improved.

Description

technical field [0001] The invention relates to the technical field of atmospheric pressure low temperature plasma jet processing, in particular to an adjustable device for atmospheric pressure low temperature plasma jet array. Background technique [0002] The existing flexible electronics technology is developing rapidly. Flexible electronics is an emerging electronic technology that manufactures organic / inorganic material electronic devices on flexible / ductile plastic or thin metal substrates. With its unique flexibility / ductility, high efficiency and low cost manufacturing Technology has broad application prospects in information, energy, medical, national defense and other fields. However, for the preparation process of flexible electronic devices, the traditional discontinuous method (that is, the chip manufacturing process) is not only time-consuming, labor-intensive, but also low in productivity. In order to avoid the above-mentioned disadvantages, the fabrication p...

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Problems solved by technology

[0006] In view of the defects in the prior art, the object of the present invention is to provide an adjustable device for atmospheric pressure low-temperature plasma jet array, which solves the problems of the plasma jet array structure caused by the unadjustable position of a single plasma jet in the existing plasma jet array. Simplification and application limitations, enabling parallel processing of miniaturized plasma jets and simultaneous discharge to generate large-area uniform plasma

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