Etching-assisted micro-ultrasonic machining device and etching-assisted micro-ultrasonic machining method
An ultra-sonic machining and fine-grained technology, applied in the field of ultrasonic machining devices, can solve problems such as undesired surface structure, uncertain etching direction, complicated process, etc., and achieve the effect of reducing the amount of side etching, slow etching speed, and simple operation
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Embodiment 1
[0027] An embodiment of the etching solution used to assist micro-ultrasonic machining of the present invention, the etching solution described in this embodiment is composed of the following components in mass percentage: ferric chloride 15%, acid 3%, benzotriazole 4 %, ethylenediamine 1%, sodium dodecylsulfonate 3%, and the balance is water; the acid is composed of perchloric acid, hypochlorous acid and sulfonic acid, and the perchloric acid, hypochlorous acid and The mass ratio of sulfonic acid is 1:7:8.
[0028] The etching solution described in this embodiment is prepared by the following method:
[0029] (1) Divide the water into four parts, add ferric chloride into the first part of water, fully dissolve, and then cool to room temperature to obtain the first premixed solution;
[0030] (2) adding the acid into the second part of water, and mixing evenly to obtain the second premixed liquid;
[0031] (3) adding benzotriazole, ethylenediamine and sodium dodecylsulfonate...
Embodiment 2
[0034] An embodiment of the etching solution used for assisting micro-ultrasonic machining of the present invention, the etching solution described in this embodiment is composed of the following components in mass percentage: ferric chloride 9%, acid 5%, benzotriazole 3 %, ethylenediamine 1%, sodium dodecylsulfonate 2%, and the balance is water; the acid is composed of perchloric acid, hypochlorous acid and sulfonic acid, and the perchloric acid, hypochlorous acid and The mass ratio of sulfonic acid is 2:12:25.
[0035] The preparation method of the etching solution described in this embodiment is the same as that in Example 1.
Embodiment 3
[0037] An embodiment of the etching solution used to assist micro-ultrasonic machining of the present invention, the etching solution described in this embodiment is composed of the following components in mass percentage: ferric chloride 10%, acid 4%, benzotriazole 3 %, ethylenediamine 1.5%, sodium dodecylsulfonate 3%, and the balance is water; the acid is composed of perchloric acid, hypochlorous acid and sulfonic acid, and the perchloric acid, hypochlorous acid and The mass ratio of sulfonic acid is 1:10:20.
[0038] The preparation method of the etching solution described in this embodiment is the same as that in Example 1.
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