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Femtosecond laser scanning power control device and method, femtosecond laser processing system

A technology of power regulation and femtosecond laser, which is applied to lasers, laser welding equipment, laser components, etc., can solve the problem of difficult adjustment of laser power with scanning speed

Active Publication Date: 2018-04-27
JILIN UNIV
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Problems solved by technology

[0004] Embodiments of the present invention provide a device and method for linearly adjusting laser power with scanning speed during femtosecond laser processing, which mainly solves the problem of difficult adjustment of laser power with scanning speed when using femtosecond laser for high-quality direct line writing , and improve power regulation flexibility

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  • Femtosecond laser scanning power control device and method, femtosecond laser processing system
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  • Femtosecond laser scanning power control device and method, femtosecond laser processing system

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Embodiment Construction

[0012] The technical solutions of the present invention will be further specifically described below through the embodiments and in conjunction with the accompanying drawings. In the specification, the same or similar reference numerals designate the same or similar bottom members. The following description of the embodiments of the present invention with reference to the accompanying drawings is intended to explain the general inventive concept of the present invention, but should not be construed as a limitation of the present invention.

[0013] figure 1 is a schematic diagram of a device for linearly adjusting femtosecond laser power with scanning speed according to an exemplary embodiment of the present invention. figure 2 is a schematic diagram of a pulse modulation signal driving a modulator to select laser pulses according to an exemplary embodiment of the present invention.

[0014] The femtosecond laser source 1 uses a Tsunami femtosecond oscillator from Spectra-P...

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Abstract

A femtosecond laser scanning power control device and method, and a femtosecond laser processing system, comprising: a laser modulator configured to modulate laser light from a laser source; a pulse width modulation signal generator configured to provide the laser modulator with a pulse width modulated signal of a duty cycle; and a controller configured to communicate with a pulse width modulated signal generator to provide the duty cycle to the pulse width modulated signal generator, wherein the duty cycle is a current laser The ratio of the scanning line speed to the maximum laser scanning line speed. A femtosecond laser scanning power control method, comprising the following steps: providing a laser modulator, the laser modulator is configured to modulate laser light from a laser source; and providing a pulse width modulation signal with a duty cycle to the laser modulator, so The above duty ratio is the ratio of the current laser scanning linear velocity to the maximum laser scanning linear velocity.

Description

technical field [0001] Embodiments of the present invention belong to the field of femtosecond laser micro-nano processing, and in particular, relate to a femtosecond laser scanning power control device and method, and a femtosecond laser processing system. technical background [0002] Due to its ultra-fast time characteristics and ultra-high peak power, the femtosecond laser can quickly and accurately confine energy to a specific area in the interaction with matter, and can achieve extremely high processing accuracy. Its characteristics are: applicable to a wide range of materials, suitable for the processing of difficult-to-process materials; non-mask technology, suitable for non-planar processing; high precision, suitable for the preparation of three-dimensional complex structures. [0003] In some occasions, in order to ensure the quality of laser processing, it is necessary to adjust the power of the laser according to the speed of laser scanning. During the decelerat...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/10B23K26/00B23K26/70
Inventor 孙洪波于颜豪陈岐岱姜俊
Owner JILIN UNIV
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