A piezoresistive pressure sensor and its preparation method
A pressure sensor and piezoresistive technology, which is applied in the measurement of fluid pressure by changing ohmic resistance and the measurement of the property force of piezoresistive materials. It can solve problems such as poor biocompatibility and reduce transmission channels. , the effect of increasing the resistivity and improving the sensitivity
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[0032] The technical solutions of the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0033] Such as figure 1 As shown, a piezoresistive pressure sensor according to an embodiment of the present invention includes an LCP substrate 1 , an LCP film layer 2 , a metal electrode 3 , a graphene film layer 4 and a graphene array layer 7 . The LCP thin film layer 2 is fixedly connected on the LCP substrate 1 , the LCP thin film layer 2 is provided with through holes in an array structure, and the metal electrodes 3 are connected above the two ends of the LCP thin film layer 2 . The graphene film layer 4 is connected on the LCP film layer 2, and the graphene film layer 4 fills the gap between the metal electrodes 3 and covers the metal electrodes 3. The graphene array layer 7 is filled in the through hole of the LCP film 2, and the graphene film layer 4 and the graphene array layer 7 are connected.
[0034] Liqui...
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