Focusing device and method of using large-beam electron beam targeting micro-beam spot x-ray source

Abstract

The invention discloses a focusing device for a large-beam current electron beam targeting a micro-beam spot X-ray source and a method for using the same, including a condenser lens module, a transition section module, a movable diaphragm module, an objective lens module and an electron beam channel; After passing through the condenser module, under the action of the magnetic field formed by the condenser module, a parallel beam is formed; after passing through the transition section module, by moving the movable diaphragm, selecting a suitable aperture on the movable diaphragm to adjust the incident angle of the electron beam on the target surface , changing the beam current size and beam spot size at the target plane. The method for using the focusing device includes step 1, setting initial conditions and performance indicators; step 2, setting the parameters of the objective lens module; step 3, setting the parameters of the condenser lens module to realize the parallel working mode; step 4, realizing the electron beam current Fast switching, forming a large beam current micro-beam spot on the target surface; the advantage is: adopting parallel mode, no electron beam crossing point, reducing the Coulomb force effect between electrons.

Description

technical field [0001] The invention belongs to the technical field of three-dimensional non-destructive microscopic observation, and in particular relates to a focusing device and a using method of a large-beam electron beam targeting a micro-beam spot X-ray source. Background technique [0002] X-ray not only has short wavelength, high resolution, but also has a large penetration depth. Its non-destructive imaging capability provides technical means for scientific research observation and industrial inspection. The X-ray three-dimensional imaging microscope that uses X-rays as a detection method uses perspective projection imaging at different angles, combined with computer three-dimensional digital imaging construction technology, to clearly, accurately and intuitively display the internal structural characteristics and material density of the detected object in the form of images , the presence or absence of defects, the location and size of defects, and other informatio...

AI Technical Summary

Problems solved by technology

[0005] The focusing system of "fine-focus X-ray source" is mostly modified or referred to the magnetic lens used in electron microscopes. When the electron beam spot on the target surface is small, the beam current is small, and the X-ray intensity generated is weak, so it is difficult to obtain high-resolution images. picture

In addition, the parameters of the condenser lens and the objective lens affect each other, the beam switching process is relatively slow, and it is difficult to reproduce the dynamic process of the growth and change of the sample

Images