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Shadow Moire contour measurement device and calibration method and measurement method thereof

A contour measurement and shadow technology, which is applied to measurement devices, optical devices, instruments, etc., can solve the problems of long time and low accuracy in measuring the measured object, and achieve the effect of increasing complexity, improving measurement speed and simple structure.

Active Publication Date: 2015-12-16
XIAN TECHNOLOGICAL UNIV
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Problems solved by technology

[0003] The object of the present invention is to provide a shadow moiré profile measurement device, its calibration method and measurement method, so as to overcome the problems that the existing phase shift shadow moiré measurement device and measurement method take a long time to measure the measured object and have low precision

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  • Shadow Moire contour measurement device and calibration method and measurement method thereof
  • Shadow Moire contour measurement device and calibration method and measurement method thereof
  • Shadow Moire contour measurement device and calibration method and measurement method thereof

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Embodiment Construction

[0025] Below in conjunction with accompanying drawing, the present invention is further described, as figure 1 A shadow moiré profile measuring device shown, said measuring device comprising three line light sources 1 of red, green and blue, a color CCD camera 2, a grating 3 and a precision displacement platform; said red, green , blue, three line light sources 1 and the color CCD camera 2 are collinearly arranged on one side of the grating 3 and parallel to the grating surface; the grating 3 is arranged on a precision displacement platform, and the precision displacement platform is a manual precision displacement platform or an electric precision The displacement platform, the precision displacement platform can drive the grating 3 to move along the direction perpendicular to the grating surface; the three line light sources 1 of red, green and blue are arranged at equal intervals or approximately equal intervals on one side of the color CCD camera 2 .

[0026] The following...

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Abstract

The invention provides a shadow Moire contour measurement device and a calibration method and a measurement method thereof. The measurement device comprises red, green and blue linear light sources, a color CCD camera, a grating, and a precision displacement platform. The red, green and blue linear light sources and the color CCD camera are collinearly arranged at one side of the grating and are parallel to the surface of the grating. The grating is arranged on the precision displacement platform. The red, green and blue linear light sources are arranged at one side of the color CCD camera. The invention further provides the calibration method and the measurement method of the shadow Moire contour measurement device. The problem that measurement of a measured object takes a long time and the precision of measurement is not high for the existing phase shift shadow Moire measurement device and the measurement method is overcome.

Description

technical field [0001] The invention relates to the technical field of optical precision measurement, in particular to a shadow moiré profile measurement device, a calibration method and a measurement method thereof. Background technique [0002] Shadow Moiré profilometry has high precision and has become the preferred technique for measuring the deformation of objects under heat or force. Moreover, the JEDEC high temperature measurement industry standard also recommends the shadow Moire method as one of the main techniques for this type of measurement. So far, a large number of documents have reported the application of shadow moiré technology in the IC industry, and related documents are still emerging. These applications include chip package surface profile measurement, silicon wafer flatness measurement, and topography measurement of silicon wafer integrated circuits. However, with the continuous reduction of electronic packages and the diversification of designs, the ...

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Application Information

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IPC IPC(8): G01B11/25
Inventor 杜虎兵王建华卢春春尹培丽
Owner XIAN TECHNOLOGICAL UNIV
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