Inspection method and inspection system of flow sensor
A flow sensor and inspection system technology, applied in flow control, control/regulation system, liquid/fluid solid measurement, etc., can solve problems such as costing a lot of time and difficult flow sensor optimization
Inactive Publication Date: 2015-12-16
HORIBA STEC CO LTD
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Problems solved by technology
Therefore, it takes a lot of time to pressurize the pressure in the flow channel to the pressure suitable for starting the inspection time delay
[0006] In addition, the pressure of the flow path that enables the stable operation of the flow sensor to be inspected varies depending on the measurement range, but in the current inspection system, it does not vary depending on the flow sensor to be inspected, but is filled to approximately the same pressure. After pressure inspection, it is difficult to optimize the flow sensor corresponding to the inspection object
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[0034] A flow sensor inspection system 100 according to one embodiment of the present invention will be described with reference to the drawings.
[0035] The inspection system 100 of the flow sensor of this embodiment, such as figure 1 As shown, for example, as a part of a semiconductor manufacturing apparatus P, it is used to check the time delay of a flow sensor in a flow control device that controls the flow of various gases supplied to a process chamber C thereof.
[0036] Specifically, the semiconductor manufacturing apparatus P includes: gas supply pipes 1a, 1b, ... (hereinafter collectively referred to as "gas supply pipe 1") through which various gases for semiconductor manufacturing such as process gas and etching gas flow; The chamber pipeline CL and the inspection pipelines 3a, 3b, and 3c (hereinafter collectively referred to as "inspection pipelines 3") that are arranged in parallel to the downstream side from the confluence point where the gas supply pipelines 1 ...
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In order to provide an inspection system of a flow sensor capable of charging an appropriate pressure in a flow path in response to the inspection target flow sensor and significantly reducing a waiting time until a start of an inspection, the inspection system is provided with: fluid resistances respectively provided for a plurality of respective branch flow paths branched in a downstream of an upstream side flow path where the inspection target flow sensor is provided: valves respectively provided for the respective branch flow paths; a fluid sensor having at least a part thereof being provided in an upstream side than each of the fluid resistances for measuring a pressure or a flow rate of the fluid; and a valve opening / closing control part configured to allow a plurality of the valves to be in opened states at the time of inspecting the inspection target flow sensor.
Description
technical field [0001] The invention relates to a testing method and a testing system of a flow sensor for checking at least a time delay of the flow value determined by the flow sensor. Background technique [0002] The measured flow value output from the flow sensor may have a time delay with respect to the actual flow value. An inspection of the flow sensor is required to detect the presence or absence of such a time lag, or to adjust the flow sensor to eliminate the time lag (see Patent Document 1 (Japanese Patent Laid-Open Publication No. Hei 9-16268)). [0003] The inspection of the time delay of the flow sensor is specifically performed as follows. First, a flow sensor to be inspected, a reference flow sensor, and a flow resistance for generating a predetermined pressure in the flow path are installed on the same flow path to form an inspection system, and the flow rate of the fluid flowing through the flow path is changed. . Next, compare the time-series data of t...
Claims
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IPC IPC(8): G01F25/00
CPCG05D7/0641Y10T137/0396Y10T137/7758G05D16/2006
Inventor 安田忠弘白井隆
Owner HORIBA STEC CO LTD