Novel low-cost stack-up array liquid refrigeration semiconductor laser and manufacturing method thereof

Abstract

The invention discloses a novel low-cost stack-up array liquid refrigeration semiconductor laser and a manufacturing method thereof. The laser comprises a lower base plate, an anode block, micro-refrigeration modules with chips, a cathode block, an upper pressing block and a liquid refrigeration block which are arranged from bottom up in turn. The micro-refrigeration modules with chips are two ormore and stacked up to form a multiple bar series module group, and the lower base plate is provided with side plates on both sides; the anode block, the multiple bar series module group and the cathode block are sequentially stacked up and arranged between the two side plates on the lower base plate, the upper pressing block is arranged on the upper side of the cathode block and fixedly connectedwith upper ends of the two sides plates of the lower base plate, and the upper side of the upper pressing block is fixedly connected with the liquid refrigeration block. The laser has simple manufacturing method and low production cost, and effectively reduces flow resistance of cooling fluid, causes obviously reduced pressure drop of the cooling fluid, has easier sealing of the cooling fluid andstrong heat emission capability, effectively prolongs service life of the semiconductor laser and improves reliability by replacing a traditional micro channel structure with fins.

Description

technical field [0001] The invention belongs to the field of manufacturing semiconductor optoelectronic devices, and relates to a semiconductor laser, in particular to a novel low-cost laminated array liquid cooling semiconductor laser and a preparation method thereof. Background technique [0002] Semiconductor lasers are also called laser diodes (LDs). In the 1980s, people absorbed the latest achievements in the development of semiconductor physics, adopted novel structures such as quantum wells (QW) and strained quantum wells (SL-QW), and introduced refractive index modulation Bragg emitters and enhanced modulation Bragg emitters. The latest technology and new crystal growth technologies such as MBE, MOCVD and CBE have also been developed, enabling the new epitaxial growth process to precisely control crystal growth, achieve the accuracy of atomic layer thickness, and grow high-quality quantum wells and strained quantum well materials. As a result, the threshold current ...

AI Technical Summary

Problems solved by technology

This liquid circulation cooling system has a strong heat dissipation capacity, effectively solves the problem of excessive temperature caused by the heating of the chip when the micro-refrigeration modules with chips are working, and makes the output power of the semiconductor laser larger. In addition, the structure of the invention is simple, and the cooling medium is circulated and cooled. Small flow resistance and pressure drop during the process, easy to seal

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