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Biaxial motion platform positioning and dynamic locus tracking control device and method

A motion platform and trajectory tracking technology, applied in program control, digital control, electrical program control, etc., can solve problems affecting the positioning accuracy of the dual-axis motion platform system, affecting the tracking accuracy of the dual-axis motion platform system, and platform vibration.

Inactive Publication Date: 2015-12-16
BOHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, although the linear motor direct drive structure has many advantages, it also brings some negative effects to the system, such as parameter perturbation, load disturbance, model error, friction, end effect and other uncertain factors will greatly affect the dual Tracking Accuracy of Axis Motion Platform System
In addition, when the platform performs positioning control, if the overshoot of the dual-axis motion platform system is too large, it will cause platform vibration and affect the positioning accuracy of the dual-axis motion platform system

Method used

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  • Biaxial motion platform positioning and dynamic locus tracking control device and method
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  • Biaxial motion platform positioning and dynamic locus tracking control device and method

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Embodiment Construction

[0087] Embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0088] A positioning and dynamic trajectory tracking control device for a two-axis motion platform, its structure is as follows figure 1 As shown, it specifically includes: a DSP processor; a position and speed detection circuit for converting the position and speed signals collected by the grating ruler into a digital quantity that can be recognized by the DSP; for collecting the motor current and converting the current analog quantity into a digital quantity that can be recognized by the DSP Digital current detection circuit; key display board for setting DSP parameters and displaying DSP processing results; power interface board, IGBT driver board, first three-phase half-bridge IGBT group and second three-phase half-bridge IGBT group.

[0089] Since the two permanent magnet synchronous linear motors and their drive circuits in the dual-axis...

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Abstract

The invention relates to a biaxial motion platform positioning and dynamic locus tracking control device and method and belongs to the technical field of multi-axis motion control. The method comprises steps of: setting a position coordinate according to a shape of an instruction motion locus and enabling two linear motors to motion when receiving the same instruction signal; determining the actually-measured position and actual speed of each linear motor; computing the position tracking error and the rotating speed deviation of each linear motor; performing variable-speed switching control if a positioning instruction is executed; in a dynamic locus tracking control process executed in real time, preliminarily designing an inversion sliding-mode control law, namely the control current of a permanent-magnetic synchronous linear motor, by selecting a Lyapunov function, correcting the control law in real time in combination with an adaptive method, and feeding the corrected control law, namely the corrected input current, back to the system. The device and the method may achieve smooth platform positioning speed transition, improve platform positioning precision, suppress disturbance existing in the platform system, and achieve precision tracking control of a dynamic locus.

Description

technical field [0001] The invention belongs to the technical field of multi-axis motion control, and in particular relates to a positioning and dynamic trajectory tracking control device and method for a two-axis motion platform. Background technique [0002] In industrial control, high-speed and high-precision motion control, as a key general-purpose technology in the assembly manufacturing industry, is widely used in chip manufacturing equipment, high-speed CNC machining centers, laser engraving, robots, precision mechanical equipment, etc., especially in the chip manufacturing industry and The high-speed, high-acceleration and high-precision requirements of high-end manufacturing equipment such as high-speed CNC machining centers on the motion mechanism are common requirements for the development of the industry. [0003] The two-axis motion platform is a two-dimensional platform that is directly driven by two permanent magnet synchronous linear motors and the X and Y ax...

Claims

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Application Information

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IPC IPC(8): G05B19/19
CPCG05B19/19G05B2219/31443
Inventor 李兵付莹肖冰李明张亮
Owner BOHAI UNIV
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