Graphene synthesis apparatus and graphene synthesis method using same

Abstract

The present invention discloses a graphene synthesis apparatus, comprising: a chamber having inner spaces wherein a plurality of substrates having surfaces arranged to face each other are loaded; a gas supply unit for supplying, to the inner spaces, gas containing carbon; a main heating unit for irradiating, to the inner spaces, radiant heat; a first auxiliary heating unit arrangedto face one surface of the substrates corresponding to the main heating unit, converting the radiant heat to convection heat, and emitting the converted convection heat into the inner spaces; and a plurality of second auxiliary heating units arranged to face at least one surface of the substrate among the plurality of substrates, heated by absorbing the radiant heat and the convection heat, and emitting the heat into the inner spaces.

Description

Technical field [0001] The embodiment of the present invention relates to a graphene synthesis device for synthesizing graphene and a graphene synthesis method using the device. [0002] The present invention is derived from research carried out as part of the industrial basic technology development business of the Ministry of Knowledge Economy. [0003] [Project inherent number: 10033309; research project name: technology development project for large-area transfer and continuous production system for flexible nano-film; competent authority: Korea Institute of Machinery] Background technique [0004] Graphene is a material in which carbons are connected in a hexagonal form to form a honeycomb-shaped two-dimensional planar structure. It has the characteristics of very thin thickness and transparency, and very good electrical conductivity. Taking advantage of this characteristic of graphene, efforts to apply graphene to touch panels, transparent displays, or flexible displays, etc. a...

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Problems solved by technology

However, it is difficult to maintain such an environment when synthesizing high-quality graphene in large quantities, and the development of a large-scale graphene synthesis device has not yet been carried out.

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