Water cooling device of vacuum evaporation equipment for optical filter

A water-cooling device and optical filter technology, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of device failure, device damage, and increased cost, so as to improve work efficiency, The effect of relieving high temperature and prolonging the use time

Active Publication Date: 2016-02-03
SUZHOU OFT OPTICAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Especially in the industry, the research of water-cooling devices has been paid much attention. In the industry, the devices will generate heat, and when the heat is too large, it is necessary to discharge or cool the heat without affecting these devices. Otherwise, these devices may There will be damage, which will cause the device to fail to work, and also increase the cost. The general device uses a heat release device to discharge the heat generated by the device to achieve continuous and long-term work. However, for the filter vacuum evaporation equipment, The equipment needs to work continuously and uninterruptedly, and the heat generated by the electrode rods in the equipment needs to be discharged urgently, but the general radiator cannot work for a long time, and the exhaust device can only relatively slow down the increase of the heat, so as to Fundamentally, it is impossible to cool down quickly, resulting in low work efficiency.

Method used

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  • Water cooling device of vacuum evaporation equipment for optical filter
  • Water cooling device of vacuum evaporation equipment for optical filter
  • Water cooling device of vacuum evaporation equipment for optical filter

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037]In Embodiment 1, the present invention provides a water cooling device for vacuum evaporation equipment for optical filters, including: a mounting plate 1, a rotating shaft 2 is passed through the mounting plate 1, and the rotating shaft One end of the shaft 2 is driven and connected to the motor 4 through a coupling 3, and the other end of the rotating shaft 2 is fixed to the bottom end of the water cooling plate 5; the inner cavity of the water cooling plate 5 is divided into an upper cavity layer by a partition 7 8 and the lower chamber layer 9, the partition plate 7 is provided with holes, so that the upper chamber layer 8 and the lower chamber layer 9 are communicated and arranged, and a plurality of electrode rods 6 are plugged on the water cooling plate 5, and the electrode rods 6 The upper and lower ends protrude from the upper and lower ends of the water cooling plate 5; the inner cavity of the rotating shaft 2 is inserted with a water outlet pipe 23, and one end...

Embodiment 2

[0039] On the basis of the first embodiment, the present invention proposes the second embodiment. The bottom end of the water-cooling plate 5 in the second embodiment is equipped with a cooling pipe joint 25, and the cooling pipe joint 25 is in a Y-shaped structure. Quick disassembly for operation and easy maintenance.

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PUM

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Abstract

The invention relates to a water cooling device of vacuum evaporation equipment for an optical filter. A rotating shaft is connected to a mounting and fixing plate in a penetrating manner. One end of the rotating shaft is driven by a motor and is connected with the motor, and the other end of the rotating shaft is fixed together with the bottom end of a water cooling coil. An inner cavity of the water cooling coil is partitioned into an upper cavity layer and a lower cavity layer by a partition plate, and the upper cavity layer is communicated with the lower cavity layer. A water outlet pipe is connected to the inner cavity of the rotating shaft in an inserting manner. One end of the water outlet pipe extends into the upper cavity layer of the water cooling coil and is communicated with the upper cavity layer while the other end of the water outlet pipe is communicated to a water outlet of the water outlet pipe. The rotating shaft is sleeved by a water inlet pipe. One end of the water inlet pipe is communicated with the lower cavity layer of the water cooling coil and the other end of the water inlet pipe is communicated to a water inlet of the water inlet pipe. According to the water cooling device, the rotating shaft is internally provided with the water outlet pipe, the outside of the rotating shaft is sleeved by the water inlet pipe, one end of the water outlet pipe is communicated with the upper cavity layer, and one end of the water inlet pipe is communicated with the lower cavity layer, so that high temperature generated because an electrode bar works for a long term is effectively relieved, the service life of the electrode bar is prolonged, and furthermore the work efficiency is increased.

Description

technical field [0001] The invention relates to a water cooling device, in particular to a water cooling device used in vacuum evaporation equipment for optical filters. Background technique [0002] Water cooling devices are widely used in various fields of industry and agriculture, and cooling equipment can be seen everywhere in people's lives, and it is one of the indispensable process equipment. Especially in the industry, the research on water-cooling devices has been paid much attention. In the industry, the devices will generate heat, and when the heat is too large, it is necessary to discharge or cool the heat without affecting these devices. Otherwise, these devices may There will be damage, which will cause the device to fail to work, and also increase the cost. The general device uses a heat release device to discharge the heat generated by the device to achieve continuous and long-term work. However, for the vacuum evaporation equipment for optical filters, The ...

Claims

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Application Information

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IPC IPC(8): C23C14/24
Inventor 赵培何清
Owner SUZHOU OFT OPTICAL TECH CO LTD
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