Electrochemical machining process and electrochemical machining device

Abstract

The invention discloses an electrochemical machining process. The electrochemical machining process includes the steps that a machining disc and a spray nozzle are provided, the bottom surface of the machining disc and the surface of a workpiece are arranged in parallel, the machining disc and the spray nozzle move synchronously, the spray nozzle sprays an electrolyte solution towards the surface of the workpiece, the machining disc and the spray nozzle are in parallel connection with a power supply so as to form two current loops, the first current loop is composed of the workpiece, the electrolyte solution, the machining disc and the power supply, and the second current loop is composed of the workpiece, the electrolyte solution, the spray nozzle and the power supply; the surface of the workpiece is divided into three areas towards the outer edge of the workpiece along the circle center of the workpiece, the first area contains the circle center of the workpiece, the third area contains the outer edge of the workpiece, and the second area is designed between the first area and the third area; and the first current loop is used for machining the first area and the third area of the surface of the workpiece. The center area and the edge area of the surface of the workpiece are machined through the first current loop which comprises the machining disc, a stable electric field is formed, and the machining uniformity of the surface of the workpiece is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor technology, in particular to an electrochemical processing technology suitable for electroplating or electropolishing. Background technique [0002] Electrochemical machining is a method of machining workpieces using electrochemical reactions. With the increasing development of microelectronic technology, electrochemical processing has been widely used in the manufacture of integrated circuits. In the field of integrated circuit manufacturing, electrochemical processing includes electroplating and electropolishing processes. [0003] At present, the electroplating process is mainly to immerse the entire workpiece in the electrolyte to achieve electroplating. During electroplating, the workpiece to be plated is connected to the cathode of the power supply, and the metal to be plated is connected to the anode of the power supply. After the power is turned on, the anode gradually dissolves in...

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Problems solved by technology

[0004] It can be seen that no matter the electroplating process or the electropolishing process, only a single processing mode is used in the process of processing the entire surface of the workpiece, which is prone to problems such as uniformity

For example, during electropolishing, no matter which area of ​​the workpiece is polished, it is always connected to the cathode of the power supply through the nozzle to form a current loop. Difficult to control stably, resulting in unstable polishing results, which in turn leads to unsatisfactory polishing uniformity in the entire workpiece

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