Manufacturing method of high integration-level flexible film thermoelectric cell

Abstract

The invention relates to a manufacturing method of a high integration-level flexible film thermoelectric cell. The method comprises the following steps of making micro-area lithography mask plates of a cold end conducting layer, an N/P type thermoelectricity monomer, a cold and hot end conducting interlayer insulating layer and a hot end conducting layer whose figures correspond to each other; using the lithography mask plate to make the cold end conducting layer and a cold end conducting layer output port on a micron-order polyimide film; making the N/P type thermoelectricity monomer; making the cold and hot end conducting interlayer insulating layer; making the hot end conducting layer; packaging. In the invention, the micron-order polyimide film is selected to be taken as an insulation matrix of the cell; based on a condition that the cell possesses good flexibility, the micro-area lithography mask plate is used to integrate multilayer materials into one body through a method of combining physical magnetron sputtering and microelectronic lithography. Hundreds to tens of thousands of P-N monomer pairs are integrated on a 0.1cm<2>-10cm<2>, an integration level of the cell is effectively increased and cell power output performance is greatly improved.

Description

technical field [0001] The invention belongs to the technical field of thermoelectricity, and in particular relates to a manufacturing method of a highly integrated flexible thin-film thermoelectric battery. Background technique [0002] Thermoelectric battery is a solid-state energy conversion device that uses the Seebeck effect of thermoelectric materials to directly convert heat energy into electrical energy. It is composed of P-N thermoelectric elements. Harsh environment and other advantages, it has broad application prospects in fields such as space exploration, deep sea exploration, medicine, and polar safety protection. [0003] In order to further highlight the advantages of the thermoelectric battery and make the battery have good flexibility, technical personnel in the field have carried out a lot of research and development. The thermoelectric battery with a three-dimensional structure and a square block in the past has been developed into a quasi-two-dimensional...

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Problems solved by technology

But its disadvantage is: the battery made by this invention patent has only one P-N junction, not only the integration of the battery is low, but also because the resistance of the thin film battery itself is very large, the electric power of the flexible thin film thermoelectric battery made by this method can only reach nanometer Watt level

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