A kind of manufacturing method of integrated piezoelectric universal impact sensor and piezoelectric sensitive element

A technology of sensitive components and integrated piezoelectricity, which is applied in the measurement of the properties and forces of piezoelectric devices, instruments, force/torque/power measuring instruments, etc., can solve the problems of single detection direction, low integration, low sensitivity, etc. , to achieve the effect of high natural frequency, high technical index and high sensitivity

Inactive Publication Date: 2018-05-08
INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In order to overcome the defects and deficiencies in the above-mentioned prior art, the present invention provides a manufacturing method of an integrated piezoelectric universal impact sensor and its piezoelectric sensitive element. The purpose of the present invention is to provide a piezoelectric The sensor solves the problems of existing piezoelectric sensors such as large volume, low sensitivity, single detection direction, and low integration. In the case of small volume, it realizes an integrated sensor with high sensitivity, wide-band response, and universal sensitive detection.

Method used

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  • A kind of manufacturing method of integrated piezoelectric universal impact sensor and piezoelectric sensitive element
  • A kind of manufacturing method of integrated piezoelectric universal impact sensor and piezoelectric sensitive element
  • A kind of manufacturing method of integrated piezoelectric universal impact sensor and piezoelectric sensitive element

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Embodiment 1

[0052] As a preferred embodiment of the present invention, with reference to the attached figure 1 , 2 and 3, this example discloses

[0053] An integrated piezoelectric universal impact sensor, including a mass block 1 and a piezoelectric sensitive element 2, the piezoelectric sensitive element 2 is provided with a Z-axis axial pressure sensitive output electrode pair 21 / 22, a Y-axis axial pressure Sensitive output electrode pair 23 / 24, X-axis axial pressure sensitive output electrode pair 25 / 26 and mass block welding electrode 27; the mass block 1 is welded on the top of the piezoelectric sensitive element 2 through the mass block welding electrode 27; The direction perpendicular to the axis of the sensitive element 2 is defined as the Z axis, the horizontal direction perpendicular to the Z axis is defined as the X axis, and the direction perpendicular to the plane formed by the X axis and the Z axis is defined as the Y axis.

Embodiment 2

[0055] As another preferred embodiment of the present invention, with reference to the attached figure 1 , 2 and 3, this embodiment discloses:

[0056] An integrated piezoelectric universal impact sensor, including a mass block 1 and a piezoelectric sensitive element 2, the piezoelectric sensitive element 2 is provided with a Z-axis axial pressure sensitive output electrode pair 21 / 22, a Y-axis axial pressure Sensitive output electrode pair 23 / 24, X-axis axial pressure sensitive output electrode pair 25 / 26 and mass block welding electrode 27; the mass block 1 is welded on the top of the piezoelectric sensitive element 2 through the mass block welding electrode 27; The direction perpendicular to the axis of the sensitive element 2 is defined as the Z axis, the horizontal direction perpendicular to the Z axis is defined as the X axis, and the direction perpendicular to the plane formed by the X axis and the Z axis is defined as the Y axis.

[0057] The Z-axis axial pressure-se...

Embodiment 3

[0060] As another preferred embodiment of the present invention, with reference to the attached figure 1 , 2 and 3, this embodiment is a further supplement and illustration made on the basis of embodiment 2. In this embodiment, the Z-axis axial pressure-sensitive output electrode pair 21 / 22 is distributed on the left and right sides of the piezoelectric sensitive element 2 end; the X-axis axial pressure-sensitive output electrode pair 25 / 26 is distributed on the right end of the front and rear sides of the piezoelectric sensitive element 2; the Y-axis axial pressure-sensitive output electrode pair 23 / 24 is distributed on the piezoelectric sensitive element 2 The left end of the front and rear sides.

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Abstract

The invention discloses an integrated piezoelectric type universal impact sensor and a manufacture method for a piezoelectric sensing member, relating to the sensor technology field. The integrated piezoelectric type universal impact sensor comprises a mass block and a piezoelectric sensing element; the piezoelectric sensing element is provided with a Z axis axial pressure sensitive output electrode pair, a Y axis axial pressure sensitive output electrode pair, an X axis axial pressure sensitive output electrode pair and a mass block welding electrode; and the mass block is welded on the top of the piezoelectric sensitive member through the mass block welding electrode. The invention adopts a novel integrated structure model to integrate the Z axis compression type induction output with the X,Y axes shearing induction output and realizes the sensitive output of the X axis, the Y axis and the Z axis through the following partition polarization. The technology is reformed and improved.

Description

technical field [0001] The invention relates to the technical field of piezoelectric sensors, in particular to a manufacturing method of an integrated piezoelectric universal impact sensor and a piezoelectric sensitive element thereof. Background technique [0002] With the development of market demand for low-frequency vibration monitoring of industrial machinery, vehicle acceleration shock detection, bridge vibration monitoring, and military collision fuzes, higher requirements are put forward for the miniaturization, direction sensitivity, and integration of shock sensors. Piezoelectric shock sensors are a key branch of this application field, and miniaturization, high sensitivity, integration, and multi-directional sensitivity have become the development direction of new piezoelectric sensors. [0003] At present, the basic structure of a typical piezoelectric shock sensor is composed of piezoelectric sensitive elements and mechanical structural parts. The piezoelectric ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/16G01L5/00
Inventor 赵宝林刘显学刘天国陶逢刚
Owner INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS
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