Disc multi-ring inner double-beam isolated ring resonator gyro and preparation method thereof
A technology of resonant gyroscope and ring resonator, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, measuring device, etc., can solve the problems of hemispherical resonant gyroscope offset and dynamic load connection inaccuracy, etc., to achieve Stable structure, simple processing steps, good for mass production
Active Publication Date: 2016-03-02
SHANGHAI JIAO TONG UNIV
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However, since the rod part of the early rod structure resonators needs to be assembled on the micromechanical mechanism, higher dynamic loads and imprecise connections at the joints will lead to larger deflection of the hemispherical resonator in the long run
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[0054] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0055] Such as Figure 1A , Figure 1B , Figure 1C As shown, this embodiment provides a double-beam isolated circular ring resonant gyroscope in a disc multi-ring, including:
[0056] A base 100, comprising a central cylinder, 8 protruding fan ring parts on the secondary periphery, and 8 electrode sheets on the outermost periphery;
[0057] A double-beam isolated ring resonator 102 in a disk multi-ring, including a central cylinder, 8 double-beam isolated rings and multiple concentric rings, wh...
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The invention provides a disc multi-ring inner double-beam isolated ring resonator gyro and a preparation method thereof. The resonator gyro comprises a base; a disc multi-ring inner double-beam isolated ring resonator, which consists of a central cylinder, a plurality of double-beam isolated rings and a plurality of concentric rings, wherein the central cylinder is connected to the base, the concentric rings are connected through a plurality of spokes, both ends of the plurality of double-beam isolated rings are all connected to the central cylinder and the inside of the concentric rings' smallest ring respectively; and a group of electrodes that are distributed on the peripheral edge of the disc multi-ring inner double-beam isolated ring resonator, with each electrode being connected to the base respectively. The disc multi-ring inner double-beam isolated ring resonator gyro provided by the invention has the advantages of small volume, stable structure and sensitive response, etc., and also has good symmetry, thus being able to achieve high performance.
Description
technical field [0001] The invention relates to a gyroscope in the field of micro-electromechanical technology, in particular to a double-beam isolated circular ring resonant gyroscope in a disc multi-ring and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can sensitively detect the angle or angular velocity of the carrier, and plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, workin...
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Login to View More IPC IPC(8): G01C19/5684
CPCG01C19/5684
Inventor 张卫平朱甲强唐健邢亚亮
Owner SHANGHAI JIAO TONG UNIV