Wafer mounting and lifting conveying device of graphite boat
Patent Information
- Authority / Receiving Office
- CN Β· China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SHENGZHOU SIGMA TECH
- Publication Date
- 2016-03-16
Smart Images
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Abstract
Description
technical field
[0001] The invention relates to a sheet loading, lifting and conveying device for a graphite boat. Background technique
[0002] In the production process of crystalline silicon solar cells, it is necessary to uniformly put the silicon wafers that have undergone texturing, high-temperature diffusion and etching into the graphite boat one by one, and then transport the graphite boat smoothly, so that the silicon in the graphite boat The sheet can be processed in the next process. Before the silicon wafer in the graphite boat is processed in the next process, the graphite boat needs to be placed horizontally on the upper side of the translation support, so that the graphite boat can be transported and processed horizontally and smoothly. Traditionally, the graphite boat is manually transported to the translation On the upper side of the bracket, due to the large volume and heavy weight of the graphite boat, the labor intensity of the workers in the process of ...