Etalon of convex reference surface with long radius of curvature

Abstract

An etalon of a convex reference surface with a long radius of curvature relates to the field of optical lens design, wherein an incident ray successively passes through an aperture diaphragm, a beam expansion component, a Zernike surface shape compensation component, an aberration balance component and a standard reference surface; the aperture diaphragm, the beam expansion component, the Zernike surface shape compensation component, the aberration balance component and the standard reference surface are disposed with the same optical axis; the Zernike surface shape compensation component compensates a residual aberration of optical design; the aberration balance component balances an aberration of the whole etalon to generate a wave surface which is perpendicular to emergence of the reference surface; and the standard reference surface reflects a light beam by a reflectivity rate of 3.5% to make the light beam return into an interferometer along the original route so as to provide a reference wave surface. The etalon of the convex reference surface with the long radius of the curvature provided by the invention is different from current commercialized products. A utilization requirement for measurement of a concave surface with the long radius of curvature effectively decreases measuring space, solves the problem about spatial limiting and can be physically realized easily. Meanwhile, the etalon of the convex reference surface with the long radius of curvature adopts the Zernike surface shape compensation component which can be processed easily to realize the aberration compensation, so that design difficulty is reduced greatly.

Description

technical field [0001] The invention relates to the field of optical lens design, in particular to a convex reference surface etalon with long curvature radius. Background technique [0002] The Fizeau surface measurement interferometer is mainly used for low-frequency surface measurement of components. As a non-contact optical measurement method, it has the advantage of a common optical path, that is, the reference optical path and the measured optical path are almost coincident inside the interferometer. optical elements, produce the same wave aberration. The interferogram generated by the reference wave surface and the measured wave surface only includes the relative surface shape of the reference surface and the measured surface, and does not include the internal system error of the interferometer. At present, it has become an important means of surface shape detection of optical components. The etalon is an important part of the Fizeau surface shape measurement interf...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problems existing in the prior art, the present invention provides a convex reference surface etalon with a long radius of curvature, which solves the problem of limited measurement space of a concave surface with a long radius of curvature

Images