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Method for prolonging service life of graphite boat for PECVD furnace

A graphite boat, life-span technology, applied in the direction of using liquid cleaning methods, chemical instruments and methods, cleaning methods and utensils, etc., can solve the problems of increasing costs, high value of graphite boats, affecting the service life of graphite boats, etc.

Active Publication Date: 2016-04-06
阳光中科(福建)能源股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, although the saturation process can improve the quality of the film on the surface of the silicon wafer, the waste of gas is very serious.
Not only that, pickling is required every 100 times of use, which seriously affects the service life of the graphite boat, and it needs to be replaced every 0.5-1.5 years, and the value of the graphite boat is high, which further increases the cost

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] New factory graphite boat

[0018] 1) Dosing: Pour concentrated nitric acid into the acid tank;

[0019] 2) On the boat: Loosen all the nuts on the graphite boat to clean the graphite boat more thoroughly. The graphite boat is then placed in the acid tank.

[0020] 3) Soak the graphite boat for a total of 3 hours at a temperature of 30-50°C; set the bubble to 20 minutes every 1 hour;

[0021] 4) Wash with bubbling water for 2 hours, change the water every hour, and keep bubbling during cleaning;

[0022] 5) The temperature is 140 degrees Celsius, the ventilation is ventilated, and the drying time is 12 hours

[0023] 6) The dried graphite boat is immersed in the silicon melt under vacuum (temperature 1450 degrees Celsius), and then slowly raised for 120 minutes, until the surface of the graphite boat is cooled to 1300 degrees Celsius, and the silicon crystal is solidified on the graphite surface for 4-20 minutes. micron thick;

[0024] 7) Take out the graphite boat...

Embodiment 2

[0027] New factory graphite boat

[0028] 1) Dosing: Pour concentrated nitric acid into the acid tank;

[0029] 2) On the boat: Loosen all the nuts on the graphite boat to clean the graphite boat more thoroughly. The graphite boat is then placed in the acid bath.

[0030] 3) Soak the graphite boat for a total of 3 hours at a temperature of 30-50°C; set the bubble to 20 minutes every 1 hour;

[0031] 4) Wash with bubbling water for 2 hours, change the water every hour, and keep bubbling during cleaning;

[0032] 5) The temperature is 140 degrees Celsius, the ventilation is ventilated, and the drying time is 12 hours

[0033] 6) After drying, the graphite boat is immersed in the silicon melt under vacuum (temperature 1425 degrees Celsius), and then slowly raised for 180 minutes, until the surface of the graphite boat is cooled to 1300 degrees Celsius, and the silicon crystal is solidified on the graphite surface for 4-20 minutes. micron thick;

[0034] 7) Take out the graph...

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Abstract

The invention discloses a method for prolonging service life of a graphite boat for a PECVD furnace. The method comprises the following steps: 1) boat loading: nuts on the graphite boat are all loosened, and then, the graphite boat is positioned in an acid tank; bubbling and acid washing: concentrated nitric acid is adopted, and the temperature is 30-50 DEG C, the graphite boat is soaked for 2-3 hours altogether, and the bubbling is performed for 20-30 minutes in each hour; bubbling and water washing: water is replaced each hour of 2-3 hours, and the bubbling is continued during cleaning; ventilation and drying: the temperature is 130-150 DEG C, the ventilation is performed, and the drying time is 8-20 hours; 2) the dried graphite boat is dipped in molten silicon in a vacuum state, the graphite boat is slowly hoisted to leave the liquid surface until the surface of the graphite boat is cooled to 1300 DEG C, and the time is 30-180 minutes; and 3) the graphite boat is cooled to room temperature under the protection of inert gas, and is taken out. The method prolongs the service life of the graphite boat.

Description

technical field [0001] The invention relates to the photovoltaic field, in particular to a method for prolonging the service life of a graphite boat used in a PECVD furnace. Background technique [0002] In the process of preparing solar cells, it is necessary to use tubular PECVD to coat anti-reflective coatings. The composition of the anti-reflection film is silicon nitride. Due to the pore structure of graphite, it has a certain degree of adsorption to silicon nitride gas, and the film thickness on the surface of the silicon wafer is uneven during the process of passing the gas through the PECVD coating anti-reflection film. At present, most enterprises adopt graphite boat cleaning and saturation process. That is: after the graphite boat is used for about 100 times (about 0.5-1 month), it is cleaned; then saturated treatment, the saturation treatment is carried out on the graphite boat loaded or not loaded with silicon chips or dummy chips in the PECVD furnace. For sil...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B3/08B08B3/10
CPCB08B3/08B08B3/102
Inventor 许新湖柯雨馨戴亮亮
Owner 阳光中科(福建)能源股份有限公司
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