Photo electron spectroscopy equipment having sample adjustment controller

Abstract

The invention relates to photo electron spectroscopy equipment having a sample adjustment controller, wherein the sample adjustment controller comprises a control portion, a joint portion, a sample portion and a transmission portion, one end of the control portion is connected to one end of the joint portion, the other end of the joint portion is connected to the sample portion, the transmission portion is respectively connected to the control portion, the joint portion and the sample portion, the joint portion comprises at least a corrugated pipe, and an operator can drive the transmission rod of the transmission portion by controlling the control handle of the control portion to make the joint portion be driven by the transmission rod so as to further change the position of the sample portion. According to the present invention, the sample adjustment apparatus is suitable for any degrees of vacuum environments.

Description

technical field [0001] The invention relates to a sample adjustment controller, in particular to a sample adjustment controller used in a vacuum environment. Background technique [0002] Surface science is a study of the microstructure of the surface of objects, including the study of understanding the interface of different phases. We can explain some macroscopic phenomena by understanding the characteristics of the interface, in semiconductor manufacturing processes, magnetic materials, superconductors, fuel cells, etc. On the other hand, surface science is quite important. [0003] Photoelectron spectroscopy (PES) is a surface science analysis technique that can be used to observe the surface element composition of objects, the experimental formula of pure substances, impurity elements in mixtures, etc., and then analyze the surface of materials under specific conditions, because The principle of photoelectric effect When the object to be measured is irradiated by excit...

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Problems solved by technology

[0004] When performing surface measurements, experimenters sometimes need to adjust the position of the object to be measured, and the drive system generally used for observation instruments in the atmosphere is not suitable for high-vacuum environments due to the limitations of lubricant volatilization and other issues. Therefore, the drive components used in photoelectron spectrometers must use ultra-high vacuum compatible adjustment devices,

[0005] The currently known photoelectron spectrometers used in the adjustment device of the test object have some problems, for example, it is difficult to weld heterogeneous metal materials in vacuum, or when the rotation center of the test object is not the center of the test object, after the rotation angle is caused, It is necessary to adjust the X-axis and Y-axis to return to the center of the sample; in addition, when facing the object to be tested that needs to be heated or cooled, the tightness between the components of the object to be measured adjustment device is not good, which may cause inaccurate measurement , seal damage or even damage the whole mechanism; therefore, the inventors believe that it is necessary to provide a new sample adjustment controller

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