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Integrated detection device

A technology for detection devices and detectors, applied in measuring devices, radiation measurement, X/γ/cosmic radiation measurement, etc., can solve problems such as error and long detection time

Active Publication Date: 2019-11-26
STMICROELECTRONICS SRL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The above detectors have the disadvantage of detecting particles one by one and thus have long detection times
Also, it introduces error when the particles are aligned along the line connecting the detector and source

Method used

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  • Integrated detection device
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Examples

Experimental program
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Embodiment Construction

[0035] figure 1 with figure 2 An embodiment of a particle detector 100 integrated in a body 2 having a first face 2A and a second face 2B is illustrated. The body 2 may be formed by a substrate 20 of semiconductor material, such as a monolithic monocrystalline silicon, covered on one of its main surfaces by a first protective layer 3A and on the other of its main surfaces by a second protective layer 3A. Covered by a layer 3B, the protective layers 3A, 3B are, for example, both of insulating material and form the first face 2A and the second face 2B, respectively.

[0036] The body 2 houses a sample chamber 4 formed by an opening extending between the two faces 2A and 2B of the body 2 . The sample chamber 4 is formed by two mutually adjoining and substantially aligned parts, comprising a detection area 4A extending from the first face 2A of the body 2 and a collection area 4B extending from the second face 2B. In the illustrated example, the detection area 4A has, for exam...

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Abstract

The present application relates to integrated detection devices. The detection means is formed in a body of semiconductor material having a first face, a second face and a cavity. A detection zone is formed in the cavity, and a gas pump is integrated in the body and configured to force gas towards the detection zone. An optical type detection system or an alpha particle detector is at least partially arranged in the detection region.

Description

technical field [0001] The present application relates to integrated detection devices, in particular detectors for particles such as particles or alpha particles contained in a gas. Background technique [0002] Particle detectors are known, for example, for detecting particles having a diameter smaller than a preset value. For example, devices are available for measuring particles or particle PM. Such microscopic particles present in the atmosphere and formed, for example, from dust, smog, aerosol droplets, etc. may present a threat to health and pose an environmental risk affecting climate change. [0003] To detect particles, some devices pass an air sample through a channel with a beam of light generated, for example, by a laser, which scatters particles contained in the air by striking them. Detectors arranged along the path of the scattered light measure the diameter of the particles based on the detection signal and count their number. [0004] For example, the de...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N15/00H10N10/10
CPCG01N2015/035G01N15/02G01N15/0205G01N15/06G01N15/10G01N2001/2276F04B19/06F04B37/00G01T1/178G01T1/244G01T1/2928
Inventor S·洛伊A·帕加尼
Owner STMICROELECTRONICS SRL