Method for measuring conductivity of graphene film based on terahertz time-domain spectroscopy

Abstract

The invention relates to a method for measuring the conductivity of a graphene film based on terahertz time-domain spectroscopy, belonging to the field of application of terahertz time-domain spectroscopic detection technology. The method comprises the following steps: S1, adjusting and acquiring a terahertz time-domain spectroscopic system optical path applicable to measurement of the film; S2, measuring and acquiring the terahertz time-domain spectral signal of a substrate material; S3, measuring and acquiring the terahertz time-domain spectral signal of the substrate material with a transferred graphene film; S4, calculating the conductivity of the graphene film in a terahertz wave band by using a formula according to the signals acquired in the steps S2 and S3; and S5, establishing a standard relation curve between the conductivity obtained by using the terahertz time-domain spectroscopy and conductivity obtained by using a traditional fourpoint method, acquiring a correlation factor and acquiring the conductivity of graphene in a visible light band according to the correlation factor. The method is applicable to detection of graphene transferred onto a semiconductor or high-molecular substrate and can be promoted to detection of the conductivity of other semiconductor films.

Description

technical field [0001] The invention belongs to the application field of terahertz spectrum detection technology, and relates to a method for measuring the conductance of a graphene film based on the terahertz spectrum technology. Background technique [0002] Graphene is a two-dimensional thin film material composed of carbon atoms with sp2 hybrid orbitals in a hexagonal honeycomb lattice. It has high mechanical strength, high light transmittance, high thermal conductivity, and high electrical conductivity. In the single atomic layer graphene structure, each carbon atom is sp2 hybridized and can contribute an unbonded p-orbital electron, forming a delocalized large π bond. These electrons can move freely on the nearly perfect graphene plane, thus endowing graphene with good electrical conductivity, and its theoretical conductivity is 10 6 S / m is the material with the best conductivity found so far. The high electrical conductivity of graphene is one of the most critical f...

AI Technical Summary

Problems solved by technology

At present, the commonly used method for measuring graphene conductance is mainly the four-probe resistance measurement method, which has cumbersome operation,...

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