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Ultraviolet laser telecentric f-theta scanning field mirror and optical scanning system based on the field mirror

A technology of ultraviolet laser and scanning field, applied in the field of ultraviolet laser scanning system, can solve the problems such as reducing the processing accuracy of equipment, and achieve the effect of low cost and easy lens processing

Active Publication Date: 2018-03-02
SHANGHAI EVENOPTICS TECH CO LTD
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

This excessive astigmatism will seriously reduce the processing accuracy of the equipment

Method used

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  • Ultraviolet laser telecentric f-theta scanning field mirror and optical scanning system based on the field mirror
  • Ultraviolet laser telecentric f-theta scanning field mirror and optical scanning system based on the field mirror
  • Ultraviolet laser telecentric f-theta scanning field mirror and optical scanning system based on the field mirror

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Embodiment

[0035] figure 1 It is a schematic diagram of the optical system structure based on the telecentric F-theta scanning field mirror. Such as figure 1 As shown, the optical system can be widely used in laser drilling, laser marking and laser cutting. The beam emitted by the laser light source (not shown in the figure) passes through the beam expander and the two reflectors in the galvanometer, the x-direction reflector and the y-direction reflector. The rotation of the x-direction reflector will make the laser spot in the processing The object moves in the x direction, and the rotation of the mirror in the y direction will cause the laser spot to move in the y direction of the processed object. The two mirrors are orthogonal to each other, and finally the laser beam is focused on the image plane through the telecentric F-theta scanning field mirror. . The two-dimensional scanning of the laser beam on the imaging surface is realized by rotating the x- and y-direction mirrors in ...

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Abstract

The invention relates to an ultraviolet laser telecentric F-theta scanning field lens and an optical scanning system based on the field lens. The ultraviolet laser telecentric F-theta scanning field lens includes a first lens, a second lens, a third lens and a fourth lens from a laser incident direction, wherein the first lens is a double-concave negative lens, the second lens is a meniscus negative lens with the concave surface towards the incident light side, the third lens is a double-convex positive lens, and the fourth lens is a double-convex positive lens. In comparison with the prior art, the scanning field lens is configured as the ''-+++'' focal power distribution, so that an exit pupil of the scanning field lens is positioned in the infinite distance. The telecentricity of an image main light in a field of view is less than 3 degrees, and astigmation of the scanning field lens is well corrected and is less than 0.05mm. The lens processing is easy, and the cost is low.

Description

technical field [0001] The invention relates to an ultraviolet laser scanning system, in particular to an ultraviolet laser telecentric F-theta scanning field mirror and an optical scanning system based on the field mirror. Background technique [0002] With the continuous development of laser processing, the requirements for laser processing equipment are getting higher and higher, which is not only reflected in the processing efficiency, but also requires the processed lines to be finer and finer. Lasers with wavelengths of λ=1064nm and 532nm can no longer meet the relevant processing requirements. In order to achieve a finer and clearer processing effect, the use of short-wave ultraviolet laser can make the focus spot extremely small, as shown in the following formula: [0003] Airy disk diameter δ=2.44×λ / F # [0004] It can be seen from the above formula that when using the same F # When the scanning field lens is used, when the laser wavelength λ=355nm is used, the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/10G02B13/00G02B13/14
CPCG02B13/0005G02B13/004G02B13/143G02B26/101
Inventor 庄怀港谭羽白学坤
Owner SHANGHAI EVENOPTICS TECH CO LTD
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