Manufacturing method of microfluidic chip with movable upper and lower walls
A technology of microfluidic chips and manufacturing methods, applied in chemical instruments and methods, laboratory containers, laboratory utensils, etc., can solve problems that are not fully understood by people, and achieve mature and reliable manufacturing and processing methods Guaranteed effect
Active Publication Date: 2017-08-25
BEIJING UNIV OF TECH
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Problems solved by technology
In addition, there are many technologies in the world that are inseparable from liquid manipulation, and when the manipulated fluid flows in the micron-scale space, there will be many phenomena that are different from the macro-scale, and some of them have not been fully understood by people so far. With one tool that's miniaturized yet conveniently manages the big picture
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[0017] like Figure 1-3 , the following combined with the content of the present invention provides a specific manufacturing process of using grooves to realize the movement of the upper and lower walls on a microscale. The specific steps are:
[0018] 1) Thin film with microchannel structure: Mix PDMS (polydimethylsiloxane) main agent and coagulant uniformly in a ratio of 10:1, place all bubbles in a vacuum environment at room temperature, and pour it into On a silicon wafer containing a micro-scale channel structure and a groove structure punch; place the silicon wafer on the tray of a centrifugal homogenizer, adjust the speed to 300rpm and keep it for a long enough time; place the silicon wafer at 65°C after the film is thrown It was solidified in an oven for about 1 hour to obtain a solid PDMS film with a thickness slightly greater than the height of the channel, with a microchannel structure and a groove structure.
[0019] 2) Making the groove structure and substrate: t...
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A manufacturing method of a microfluidic chip with a movable upper wall face and a movable lower wall face is provided; a micro-scale thin film manufacturing and taking method is used for reference, a size and a bonding position of a PDMS (polydimethyl siloxane) groove are utilized for achieve movability of the upper wall face and the lower wall face of the microfluidic chip in a specified length and a specified position. The method comprises the steps: manufacturing a thin film with a micro channel structure in a swing manner; manufacturing a groove structure and a base; bonding the opening side of a groove on a PDMS solid block with the groove structure to a position, set to be movable, of the thin film channel; placing the bonded structure in a 90 DEG C heating plate for about 15 min; and after being stable, cutting the bonded structure open to obtain a solid structure with the movable upper wall face; bonding the opening side of the channel to a groove of the thin film, and making the position coincident with the position of the groove in the vertical direction; and placing the bonded structure on the 90 DEG C heating plate for about 15 min; and after being stable, cutting the bonded structure open to obtain the required solid block. The base is bonded; the grooves can be utilized for achieve movability of the upper wall face and the lower wall face of the microfluidic chip, the related manufacturing and processing method is mature, and the reliability can be guaranteed.
Description
technical field [0001] The invention relates to a method for manufacturing a microfluidic chip based on a PDMS (polydimethylsiloxane) material and utilizing grooves to realize movable upper and lower walls. Drawing lessons from the fabrication and access methods of micro-scale thin films, the size and bonding position of the PDMS groove are used to realize the movement of the specified length and specified position of the upper and lower walls of the microfluidic chip. Background technique [0002] Faced with the pressure of resource consumption, miniaturization reflects the optimization of human resource utilization and has gradually become the trend of human society development. In addition, there are many technologies in the world that are inseparable from liquid manipulation, and when the manipulated fluid flows in the micron-scale space, there will be many phenomena that are different from the macro-scale, and some of them have not been fully understood by people so far...
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IPC IPC(8): B01L3/00
CPCB01L3/502707
Inventor 刘赵淼王翔逄燕
Owner BEIJING UNIV OF TECH