Detection device for detecting thickness of vacuum vapor plating membrane and vacuum vapor plating device

A detection device and a technology of evaporation film, which is applied in the field of vacuum evaporation device and detection device for detecting the thickness of vacuum evaporation film, can solve the problems of high production cost, improve the service life, prolong the time of vibration frequency drop, and reduce the evaporation process cost effect

Active Publication Date: 2016-05-25
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The embodiment of the present invention provides a detection device and a vacuum evaporation device for detecting the thickness of the vacuum

Method used

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  • Detection device for detecting thickness of vacuum vapor plating membrane and vacuum vapor plating device
  • Detection device for detecting thickness of vacuum vapor plating membrane and vacuum vapor plating device
  • Detection device for detecting thickness of vacuum vapor plating membrane and vacuum vapor plating device

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Embodiment Construction

[0032] Embodiments of the present invention provide a detection device for detecting the thickness of a vacuum evaporation film and a vacuum evaporation device to solve the problem of high production cost caused by frequent replacement of crystal oscillators in the prior art.

[0033] The present invention will be described below in conjunction with the accompanying drawings. It should be noted that the drawings are only structural schematic diagrams, not true to scale. And it is only for explaining the present invention more clearly, but not limiting the present invention.

[0034] see Figure 1a and Figure 1b The detection device for detecting the thickness of the vacuum evaporated film provided by the embodiment of the present invention includes: a detection structure 11 and a crystal oscillator 12, and the detection structure 11 is provided with an opening 13 corresponding to the crystal oscillator, so that the evaporated molecules pass through the The opening is deposi...

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Abstract

The invention discloses a detection device for detecting thickness of a vacuum vapor plating membrane and a vacuum vapor plating device and aims to solve the problem that in the prior art, production cost is excessively high due to frequent change of a quartz vibrator. The detection device comprises a detection structure and a quartz vibrator, and the detection structure is provided with openings corresponding to the quartz vibrator so that vapor plating molecules can be deposited on the quartz vibrator through the openings; the detection device further comprises filtering layers arranged between the openings and the quartz vibrator.

Description

technical field [0001] The invention relates to the technical field of vacuum evaporation, in particular to a detection device and a vacuum evaporation device for detecting the thickness of a vacuum evaporation film. Background technique [0002] At present, the vacuum evaporation film technology has been widely used in the preparation of organic light-emitting diodes, solar cells and semiconductor chips due to its mature and stable process. For example, in the production process of organic light-emitting diodes, the vacuum evaporation process is often used to prepare functional layers and cathodes, and the control of the thickness and uniformity of the film layer is very important to the performance of the device. In the vacuum evaporation system, organic evaporation molecules or metal evaporation atoms are deposited on the crystal oscillator through the opening of the detector. At present, the piezoelectric effect of the crystal oscillator is used to detect the rate of the...

Claims

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Application Information

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IPC IPC(8): C23C14/54
CPCC23C14/542G01B7/066C23C14/546G01B17/025G01B11/0683C23C14/545H10N30/80C23C14/24
Inventor 贾文斌彭锐王欣欣朱飞飞高昕伟
Owner BOE TECH GRP CO LTD
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