Automatic resource delivering apparatus and method thereof

Abstract

An automatic resource delivering apparatus and a method thereof are provided. The automatic resource delivering apparatus includes a control server, a data bank apparatus and a plurality of resource delivering devices. The control server generates a plurality of delivery planning commands according to a plurality of dispatching instructions, respectively. A data bank controller of the data bank apparatus decides whether to enable a flow control scheme according to an amount of the delivery planning commands, and transmits control parameters corresponding to the delivery planning commands to the control server. At least one of the delivering devices executes a resource delivering operation according to an action command generated by the control server. The control server stores each of the delivery planning commands to a command queue in the data bank apparatus according to whether the flow control scheme being enabled and the control parameter corresponding to each delivery planning command.

Description

technical field [0001] The invention relates to an automatic resource transmission device and a transmission method, and in particular to an automatic resource transmission device and a transmission method of a semiconductor manufacturing plant. Background technique [0002] In a semiconductor manufacturing plant, with the increase of wafer size and production capacity, an automatic resource transfer device has become one of the important devices. In a known automatic resource transfer device, when there is a transfer requirement, an action command is directly generated to instruct the resource transfer device to perform resource transfer actions. [0003] In the case of a large increase in capacity requirements, it often happens that the number of transfer planning commands exceeds the load of the automated resource transfer device. Corresponding to this, the automatic resource transmission device in the known technology does not consider the number of transmission plannin...

AI Technical Summary

Problems solved by technology

Corresponding to this, the automatic resource transmission device in the known technology does not consider the number of transmission planning commands, but only generates corresponding action commands for each transmission planning command. Therefore, when the resource transmission device receives too many When the action command is issued, there may be a crash phenomenon, or the uneven distribution of resource transmission equipment may cause congestion, or it may occur that the control server needs to repeatedly calculate the travel path of the resource transmission equipment, resulting in transmission delays and Manage server load

In addition, high-priority transmission planning commands may be delayed or unable to be executed due to the impact of low-priority transmission planning commands when there are too many transmission planning commands.

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