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Automatic resource delivering apparatus and method thereof

A transmission device and resource technology, applied in the transmission system, electrical components, comprehensive factory control, etc., can solve problems such as delayed execution, impossible execution, and control server transmission delay, and achieve the effect of maintaining smoothness and reliability

Inactive Publication Date: 2016-06-01
POWERCHIP TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Corresponding to this, the automatic resource transmission device in the known technology does not consider the number of transmission planning commands, but only generates corresponding action commands for each transmission planning command. Therefore, when the resource transmission device receives too many When the action command is issued, there may be a crash phenomenon, or the uneven distribution of resource transmission equipment may cause congestion, or it may occur that the control server needs to repeatedly calculate the travel path of the resource transmission equipment, resulting in transmission delays and Manage server load
In addition, high-priority transmission planning commands may be delayed or unable to be executed due to the impact of low-priority transmission planning commands when there are too many transmission planning commands.

Method used

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  • Automatic resource delivering apparatus and method thereof
  • Automatic resource delivering apparatus and method thereof
  • Automatic resource delivering apparatus and method thereof

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Embodiment Construction

[0028] Please refer to figure 1 , figure 1 A schematic diagram of an automatic resource transfer device 100 according to an embodiment of the present invention is shown. The automatic resource transfer device 100 can be applied in semiconductor manufacturing plants. The automatic resource transfer device 100 includes a management server 110 , a database device 120 and a plurality of resource transfer devices 131 - 13N. The resource transmission devices 131 - 13N may be overhead monorail unmanned guided vehicle (OHT), aerial unmanned guided vehicle (OHS), rail type unmanned guided vehicle (RGV), and feeder (stoker).

[0029] The management server 110 can receive a plurality of dispatch instructions and generate a plurality of transmission plan commands respectively according to the received dispatch instructions. The management and control server 110 can also generate a plurality of action commands for the transmission planning command, and drive one or more resource transmi...

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Abstract

An automatic resource delivering apparatus and a method thereof are provided. The automatic resource delivering apparatus includes a control server, a data bank apparatus and a plurality of resource delivering devices. The control server generates a plurality of delivery planning commands according to a plurality of dispatching instructions, respectively. A data bank controller of the data bank apparatus decides whether to enable a flow control scheme according to an amount of the delivery planning commands, and transmits control parameters corresponding to the delivery planning commands to the control server. At least one of the delivering devices executes a resource delivering operation according to an action command generated by the control server. The control server stores each of the delivery planning commands to a command queue in the data bank apparatus according to whether the flow control scheme being enabled and the control parameter corresponding to each delivery planning command.

Description

technical field [0001] The invention relates to an automatic resource transmission device and a transmission method, and in particular to an automatic resource transmission device and a transmission method of a semiconductor manufacturing plant. Background technique [0002] In a semiconductor manufacturing plant, with the increase of wafer size and production capacity, an automatic resource transfer device has become one of the important devices. In a known automatic resource transfer device, when there is a transfer requirement, an action command is directly generated to instruct the resource transfer device to perform resource transfer actions. [0003] In the case of a large increase in capacity requirements, it often happens that the number of transfer planning commands exceeds the load of the automated resource transfer device. Corresponding to this, the automatic resource transmission device in the known technology does not consider the number of transmission plannin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/418H04L47/762
CPCH04L47/762H04L47/54
Inventor 严凯军侯晔旸
Owner POWERCHIP TECH CORP
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