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Device for manufacturing multichannel quartz crystal microbalance chip

A technology of quartz crystal and device, applied in measurement device, manufacturing/assembly of piezoelectric/electrostrictive devices, weighing equipment using elastically deformable parts, etc. , high toxicity of HF, etc., to achieve the effect of regular table shape, which is conducive to a large number of industrial applications and saves production costs

Active Publication Date: 2016-06-15
成都申开科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Manufacturing MQCM by chemical etching has the following disadvantages: 1) The process is complicated; 2) HF is highly toxic and dangerous to operate; 3) Since HF will react with the quartz wafer in contact, the resulting concave hole size is irregular; 4) Coating Photoresist and metal film are easy to cause wafer contamination
But at present, this method is mainly used to make a single anti-mesa structure QCM, and has not been extended to the production of MQCM.

Method used

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  • Device for manufacturing multichannel quartz crystal microbalance chip
  • Device for manufacturing multichannel quartz crystal microbalance chip
  • Device for manufacturing multichannel quartz crystal microbalance chip

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] Figure 1-5 Shown, a specific embodiment of the present invention is: a kind of manufacturing device of multi-channel quartz crystal microbalance chip, comprises electrode processing part and chip fixing part, and its structural feature is: described electrode processing part is arranged by the common The electrode processing plate 10 is composed of a functional electrode processing plate 20 fixed on the top of the common electrode processing plate 10 in a detachable manner. There is at least one common electrode hole 11 for processing the common electrode on the common electrode processing plate 10. The functional electrode processing There are at least two functional electrode holes 21 for processing functional electrodes at the area corresponding to each common electrode hole 11 on the plate 20; the chip fixing part can fix the chip on the common electrode processing plate 10 and the functional electrodes Between the processing plates 20 and covering each common elec...

Embodiment 2

[0045] Figure 8-9 Shown, another specific embodiment of the present invention is: a kind of manufacturing device of multi-channel quartz crystal microbalance chip, comprises electrode processing part and chip fixing part, and its structural feature is: described electrode processing part is positioned at the bottom The common electrode processing plate 10 and the functional electrode processing plate 20 fixed on the top of the common electrode processing plate 10 in a detachable manner are composed of at least one common electrode hole 11 for processing the common electrode on the common electrode processing plate 10, and the functional electrode There are at least two functional electrode holes 21 for processing functional electrodes at the area corresponding to each common electrode hole 11 on the processing board 20; the chip fixing part can fix the chip on the common electrode processing board 10 and the functional electrode Between the electrode processing plates 20 and ...

Embodiment 3

[0052] Figure 10-14 As shown, another specific embodiment of the present invention is: the electrode processing component is composed of a common electrode processing plate 10 located at the lower part and a functional electrode processing plate 20 fixed on the upper part of the common electrode processing plate 10 in a detachable manner, so There is at least one common electrode hole 11 for processing the common electrode on the common electrode processing plate 10, and there are at least two common electrode holes 11 for processing the functional electrode on the functional electrode processing plate 20 corresponding to each common electrode hole 11. The functional electrode holes 21; the chip fixing part can fix the chip between the common electrode processing plate 10 and the functional electrode processing plate 20, and cover each common electrode hole 11; the upper part of the functional electrode processing plate 20 is also set There is a blocking member that can block...

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Abstract

A device for manufacturing a multichannel quartz crystal microbalance chip includes an electrode processing member and a chip fixing member. The electrode processing member is formed by a common electrode processing plate and a functional electrode processing plate detachable fixed on an upper part of the common electrode processing plate. The chip fixing member is positioned between the common electrode processing plate and the functional electrode processing plate. At least a common electrode hole for processing a common electrode is arranged in the common electrode processing plate. At least two functional electrode holes for processing a functional electrode are arranged in the region corresponding to each common electrode hole in the functional electrode processing plate. The chip fixing member can fix a chip between the common electrode processing plate and the functional electrode processing plate, and covers each common electrode hole. An upper part of the functional electrode processing plate is also provided with a shielding member capable of shielding part of the functional electrode holes. The device can process counter mesa structures with different depths on a quartz crystal wafer for one time through an ion etching method, and manufactures the multichannel quartz crystal microbalance chip with low cost and high efficiency.

Description

technical field [0001] The invention relates to a manufacturing device for a multi-channel quartz crystal microbalance chip, which belongs to the field of micromachining of quartz crystal microbalances. Background technique [0002] Quartz crystal microbalance (QuartzCrystalMicrobanlance, QCM) is an acoustic thickness shear mode sensor, which consists of a quartz crystal plate with piezoelectric effect and a pair of electrodes. According to the characteristics of external physical loads, QCM is divided into two types: weight loads and viscoelastic loads. The weight load is the attachment deposited on the electrode surface, which causes the change of the resonance frequency of the QCM, and is mainly used in the thickness monitoring of the physical evaporation deposition process; the viscoelastic load is the load generated by the QCM in the viscoelastic medium environment, and the viscosity and density of the liquid cause Resonant frequency changes, which are mainly used in b...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01G3/13G01G3/16H01L41/29H10N30/06
CPCG01G3/13G01G3/16H10N30/06
Inventor 永远谢小川陈大志黄小霞
Owner 成都申开科技有限公司