A method for preparing a color filter substrate, a color filter substrate, and related devices
A technology for color filter substrate and substrate substrate, which is applied to instruments, nonlinear optics, optics, etc., can solve problems such as increased difficulty in process control, changes in color photoresist layers, and changes in display panel chromaticity, and reduces process control. effect of difficulty
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[0027] The embodiment of the present invention provides a method for preparing a color filter substrate, such as figure 1 shown, including the following steps:
[0028] S101, sequentially forming patterns of at least three color photoresist layers on the base substrate; wherein, there are at least two color photoresist layers in the preset area, and the color photoresist layer close to the base substrate in the preset area is the first A photoresist layer, the thickness of the first photoresist layer in the preset area is higher than the thickness of the first photoresist layer in other areas except the preset area;
[0029] S102. After forming the pattern of each color photoresist layer, it also includes: performing thermal baking treatment on the pattern of each color photoresist layer, and the color photoresist layer in the preset area forms a spacer; and forming a spacer after the thermal baking treatment The height of the spacer is positively correlated with the overlapp...
Embodiment 1
[0044] When the number of layers of the color photoresist layer in the first preset area is equal to the number of layers of the color photoresist layer in the second preset area, the first preset area and the second preset area respectively include two layers of color photoresist layers Take this as an example.
[0045] The manufacturing process of the color filter substrate may specifically include the following steps:
[0046] (1) Form the pattern of the first color photoresist layer 110_1 on the base substrate 100 through a patterning process, such as Figure 3a shown.
[0047] Specifically, the first color photosensitive resin photoresist is coated on the base substrate 100 by the spin coating method, and then exposed using a grayscale mask or a semi-transparent mask, and then developed and baked. , forming the pattern of the first color photoresist layer 110_1 as the first photoresist layer, such as Figure 3a shown.
[0048] (2) forming a second color photosensitive...
Embodiment 2
[0058] When the number of layers of the color photoresist layer in the first preset area is greater than the number of layers of the color photoresist layer in the second preset area, the first preset area includes three layers of color photoresist layers, and the second preset area includes Two layers of color photoresist layers are taken as an example for illustration.
[0059] The manufacturing steps of the color filter substrate include the following steps in addition to steps (1) to (3) in Embodiment 1:
[0060] (4) Forming a third color photosensitive resin photoresist on the base substrate 100 formed with the pattern of the second color photoresist layer 110_2, patterning the third color photosensitive resin photoresist, respectively forming the pattern of the third color photoresist layer 110_3 on the base substrate 100, and forming a pattern of the third color photoresist layer 110_3 on the spacer 120_1 in the first predetermined area Q_1, and In the second preset ar...
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