Heating apparatus and coating machine having same
A heating device and coating technology, applied in coating, sputtering, ion implantation and other directions, can solve the problems of equipment erosion, reduce the temperature of vapor material, wear, etc. Override the effect of quality or operational efficiency
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[0038] Hereinafter, preferred embodiments of the present invention will be described (with reference to the drawings). However, the embodiment of the present invention can be changed into various other forms, and the protection scope of the present invention is not limited to the embodiment described below. Furthermore, the embodiments of the present invention are provided to more fully explain the present invention to those skilled in the art. (Shapes, sizes, etc. of components in the drawings may be shown enlarged for clearer description.)
[0039] first, figure 1 , 13 , 14 shows the Figure 2 to Figure 10 One embodiment of the heating device 1 of the nozzle device 50 of the present invention, a modified example, and the coating machine 200 of other embodiments are described in detail.
[0040] in addition, figure 1 with Figure 13 The coating machine 200 of the present invention shown in one embodiment and its modified example describes the method of coating while mov...
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