Capacitive flexible pressure sensor based on microstructural dielectric layers and preparation method of capacitive flexible pressure sensor
A pressure sensor and micro-structured technology, applied in the field of sensors, can solve the problem that the sensitivity and stability of the sensor need to be further improved, and achieve the effects of being conducive to application promotion, low energy consumption and low cost
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[0064] Example 1:
[0065] (1) Preparation of flexible substrate
[0066] The commercially available PDMS monomer and curing agent (Dow Corning, SYLGARD 184, USA) are thoroughly mixed according to a mass ratio of 10:1, using OSP-100 Meyer rod (OSP-100, Shijiazhuang OSP Machinery Technology Co., Ltd. ) Coat on the surface of commercially available inkjet printing photo paper (Canon, LU-101 Professional Suede Photo Paper, Japan), then place it in a vacuum oven at room temperature for 5 minutes to remove air bubbles in the coating, and then cure at 70°C 2 It was peeled off the surface of the photographic paper to obtain a flexible substrate with a thickness of 100 μm.
[0067] (2) Preparation of conductive layer and electrode
[0068] Using screen printing method (screen printing machine: OS-500FB, China Ou Laite Printing Machinery Industry Co., Ltd.), printed nano silver conductive ink (AP02, Beijing Beiyin Zhongyuan Technology Co., Ltd.) on the surface of the flexible substrate to obt...
Example Embodiment
[0079] Example 2:
[0080] (1) Preparation of flexible substrate
[0081] The commercially available PDMS monomer and curing agent (Dow Corning, SYLGARD 184, USA) were thoroughly mixed according to a mass ratio of 10:1, and OSP-1.5 Meyer rod (OSP-1.5, Shijiazhuang OSP Machinery Technology Co., Ltd. ) Coat on the surface of commercially available inkjet printing photo paper (Canon, LU-101 Professional Suede Photo Paper, Japan), then place it in a vacuum oven at room temperature for 5 minutes to remove air bubbles in the coating, and then cure at 70°C 2 It was peeled off from the surface of the paper to obtain a flexible substrate with a thickness of 1 μm.
[0082] (2) Preparation of conductive layer and electrode
[0083] The conductive layer of carbon nanotubes (TNWPM, Chengdu Organic Chemistry Co., Ltd., Chinese Academy of Sciences) was coated and prepared on the surface of the flexible substrate with OSP-1.5 Meyer rod (OSP-1.5, Shijiazhuang OSP Machinery Technology Co., Ltd.), with...
Example Embodiment
[0090] Example 3:
[0091] (1) Preparation of flexible substrate
[0092] The commercially available PDMS monomer and curing agent (Dow Corning, SYLGARD 184, USA) are thoroughly mixed according to the mass ratio of 10:1, and the OSP-50 Meyer rod (OSP-50, Shijiazhuang OSP Machinery Technology Co., Ltd. ) Coat the surface of a commercially available PET film (Lucky, China, with a thickness of 100μm), then place it in a vacuum oven at room temperature for 5 minutes to remove air bubbles in the coating, then cure at 70°C for 2 hours, and remove it from the surface of the paper Peel off to obtain a flexible substrate with a thickness of 50 μm.
[0093] (2) Preparation of conductive layer and electrode
[0094] The gold coating is deposited on the surface of the flexible substrate by chemical deposition, and its surface resistance is 5Ω / sq. Silver conductive glue (Ablestik, Ablebond 84-1Limisr4) is used to form upper and lower conductive electrodes on the two conductive layers, and copper...
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