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High-precision quasi-static system for detecting and correcting beam direction coaxality

A static system, coaxial technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of laborious and laborious, not suitable for assembling lens fixed joint debugging, etc., to reduce the change of optical characteristics, improve the consistency and processing. Quality, structural design novel effect

Active Publication Date: 2016-08-31
SHANGHAI EMPOWER AUTOMATION TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In view of the above analysis and other similar problems, it is necessary to have a high-precision static detection system that can be used for beam coaxiality and directional error detection. At present, there are very few such coaxial detection products on the market, even foreign light guide arm detection The related instruments also need dynamic debugging, which is very laborious and laborious, and it is not suitable for the fixed joint debugging of assembling lenses.

Method used

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  • High-precision quasi-static system for detecting and correcting beam direction coaxality
  • High-precision quasi-static system for detecting and correcting beam direction coaxality

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Embodiment 1

[0017] see figure 1 , this embodiment provides a technical solution: a high-precision quasi-static system for detecting and correcting the coaxiality of the beam direction, including a first axicon lens 1, a second axicon lens 2 and an aspheric focusing lens 3, an aspheric focusing lens 3 is an aberration-eliminating aspheric mirror, and the aspheric focusing mirror 3 can be replaced with an aberration-absorbing lens group, whether it is a spherical lens group or an aspheric lens group, all belong to the scope of the present invention; the first axicon lens 1, the second axicon lens 2 The cone angles are the same, and the first axicon lens 1, the second axicon lens 2 and the aspheric focusing lens 3 are arranged successively between the beam incident surface and the beam exit surface, and the purpose of using a biaxial axicon lens is to Parallel or near-parallel circular beams are shaped into corresponding hollow beams, and the central axes of the first axicon lens 1, the seco...

Embodiment 2

[0020] see figure 2 , this embodiment provides a technical solution: a high-precision quasi-static system for detecting and correcting the coaxiality of the beam direction, including a first axicon lens 1, a second axicon lens 2 and an aspheric focusing lens 3, the first axicon lens The cone angles of the lens 1 and the second axicon lens 2 are the same, and the first axicon lens 1, the second axicon lens 2 and the aspheric focusing lens 3 are sequentially arranged between the beam incident surface and the beam exit surface, The purpose of using a biaxial axicon lens is to shape a solid parallel or nearly parallel circular beam into a corresponding hollow beam, and the first axicon lens 1, the second axicon lens 2 and the aspheric focusing lens 3 The central axis is coaxial, and a CCD4 capable of fine-tuning the direction of the optical axis is provided on the side of the aspherical focusing lens 3 .

[0021] In this embodiment, a half mirror 5 is also included, and the half...

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Abstract

The invention discloses a high-precision quasi-static system for detecting and correcting beam direction coaxality, which comprises a first axicon lens, a second axicon lens and an aspheric focusing lens, wherein the first axicon lens, the second axicon lens and the aspheric focusing lens are sequentially arranged between a beam incident surface and a beam emergent surface; central axes of the first axicon lens, the second axicon lens and the aspheric focusing lens are coaxial; and one side of the aspheric focusing lens is also provided with a CCD slightly adjusted in an optical axis direction. The structure design is novel, the beam transmission direction and the coaxality errors can be detected in a quasi-static high-precision qualitative mode, the actual transmission features of the beams can be corrected and restored in a high precision mode, optical feature changes caused by assembly errors of each lens are reduced to a greater degree, and the fine laser processing consistency and the processing quality are improved.

Description

technical field [0001] The invention relates to the field of optical detection systems, in particular to a coaxial high-precision quasi-static system for detecting and correcting beam directions. Background technique [0002] The industrial laser processing industry includes laser cutting, welding, drilling, micromachining, cladding, quenching, surface treatment, etc., covering laser processing of various commonly used metal or non-metal materials, especially laser cutting, drilling, Laser processing industries such as micromachining have higher requirements for beam quality. [0003] Nowadays, the mainstream laser processing lasers include fiber-coupled output lasers, CO2 lasers, etc. The market share of fiber-coupled output lasers has become increasingly prominent due to fiber flexibility, high-efficiency coupling, better beam quality, and the emergence of high-power lasers. Its two-dimensional fine laser processing optical path is often composed of collimating lens group...

Claims

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Application Information

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IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 邵华江李思佳李思泉
Owner SHANGHAI EMPOWER AUTOMATION TECH CO LTD