A high-precision quasi-static system for detecting and correcting the coaxiality of the beam direction

Abstract

The invention discloses a high-precision quasi-static system for detecting and correcting beam direction coaxality, which comprises a first axicon lens, a second axicon lens and an aspheric focusing lens, wherein the first axicon lens, the second axicon lens and the aspheric focusing lens are sequentially arranged between a beam incident surface and a beam emergent surface; central axes of the first axicon lens, the second axicon lens and the aspheric focusing lens are coaxial; and one side of the aspheric focusing lens is also provided with a CCD slightly adjusted in an optical axis direction. The structure design is novel, the beam transmission direction and the coaxality errors can be detected in a quasi-static high-precision qualitative mode, the actual transmission features of the beams can be corrected and restored in a high precision mode, optical feature changes caused by assembly errors of each lens are reduced to a greater degree, and the fine laser processing consistency and the processing quality are improved.

Description

technical field [0001] The invention relates to the field of optical detection systems, in particular to a coaxial high-precision quasi-static system for detecting and correcting beam directions. Background technique [0002] The industrial laser processing industry includes laser cutting, welding, drilling, micromachining, cladding, quenching, surface treatment, etc., covering laser processing of various commonly used metal or non-metal materials, especially laser cutting, drilling, Laser processing industries such as micromachining have higher requirements for beam quality. [0003] Nowadays, the mainstream laser processing lasers include fiber-coupled output lasers, CO2 lasers, etc. The market share of fiber-coupled output lasers has become increasingly prominent due to fiber flexibility, high-efficiency coupling, better beam quality, and the emergence of high-power lasers. Its two-dimensional fine laser processing optical path is often composed of collimating lens group...

AI Technical Summary

Problems solved by technology

[0006] In view of the above analysis and other similar problems, it is necessary to have a high-precision static detection system that can be used for beam coaxiality and directional error detection. At present, there are very few such coaxial detection products on the market, even foreign light guide arm detection The related instruments also need dynamic debugging, which is very laborious and laborious, and it is not suitable for the fixed joint debugging of assembling lenses.

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