Mask plate and manufacturing method thereof

A manufacturing method and masking plate technology, applied in ion implantation plating, metal material coating process, coating, etc., can solve problems such as poor color mixing of panels and reduced product yield

Active Publication Date: 2016-09-21
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The invention provides a mask plate and its manufacturing method, which can reduce the fluidity of the components of the existing mask plate, solve the problems of poor color mixing of the panel and lower product yield ra

Method used

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  • Mask plate and manufacturing method thereof
  • Mask plate and manufacturing method thereof

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Embodiment Construction

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention.

[0023] An embodiment of the present invention provides a mask plate, referring to figure 2 As shown, it includes: a frame 14, and mask strips 11 that contain effective openings, and the mask strips 11 are spliced ​​with each other; a shielding strip 12 is shielded at the joints of the mask strips 11 to avoid penetration of the evaporation material; The supporting strip 13 supporting the mask strip 11 is arranged perpendicular to the mask strip 11 and the shielding strip 12; the shielding strip 12 and the masking strip 11 are connected together in the overlapping area of ​​the two, and the supporting strip 13 and the shielding strip 12 are connected between the two. Overlapping regions are joined together.

[0024] The mask plate provided by the embodiment of the present inve...

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Abstract

The invention discloses a mask plate and a manufacturing method thereof, and relates to the field of display. According to the mask plate, the fluidity of components of a conventional mask plate can be reduced, the problems that color mixing of a panel is poor and the rate of good products is decreased are solved, the vibration damage risk of the mask plate during the transportation, cleaning, alignment and lamination processes is reduced, the service life is prolonged, and the production cost is reduced. The mask plate comprises a frame, mask sticks with effective openings, cover sticks and howling sticks used for supporting the mask sticks, wherein the mask sticks are mutually spliced; the cover sticks cover the mutual splicing parts of the mask sticks and are used for preventing an evaporation plating material from permeating; the howling sticks are arranged vertical to the mask sticks and the cover sticks; overlapping regions of the cover sticks and the mask sticks are connected; and overlapping regions of the howling sticks and the cover sticks are connected.

Description

technical field [0001] The invention relates to the display field, in particular to a mask plate and a manufacturing method thereof. Background technique [0002] Currently, OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) adopts a vacuum evaporation technology to prepare an organic light-emitting layer. In the device manufacturing process, organic materials are deposited on the substrate above the evaporation source by high-temperature evaporation. In order to evaporate the organic materials to a specific position according to the design, a high-precision metal mask is required under the substrate. A pre-designed effective opening area is left on the membrane plate (that is, a high-precision metal mask plate), and organic materials are deposited on the back plate through the effective opening area to form a preset pattern. Changes in the size and position of the effective opening area on the metal mask will directly affect the accuracy of the coating. [...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 吕守华
Owner BOE TECH GRP CO LTD
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