Thermal resistance thin film thermopile type transient heat flow meter and preparation method thereof

A thermopile and transient heat technology, applied in the field of heat flow meter, can solve the problems of slow response speed, expensive price, complex structure, etc., and achieve the effect of fast response speed, improved stability and small size

CN106017696BActive Publication Date: 2019-06-21SHANGHAI JIAOTONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2019-06-21

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Abstract

The invention provides a thermal resistance-type thin film thermopile-type transient heat flow meter and a manufacturing method. The heat flow meter comprises a ceramic substrate, and a positive thermocouple, a negative thermocouple, a thermocouple connection layer, an outer thermal resistance layer and an inner thermal resistance layer arranged on the ceramic substrate, wherein the positive thermocouple and the negative thermocouple are in butt joint via the thermocouple connection layer; the outer thermal resistance layer and the inner thermal resistance layer cover the positive thermocouple and the negative thermocouple; when an external environment applies heat flow in a vertical direction to the heat flow meter, the outer thermal resistance layer and the inner thermal resistance layer have different thicknesses, the positive thermocouple and the negative thermocouple are connected to form hot and cold junctions, a temperature difference exists between adjacent two hot and cold junctions, corresponding electric potential output exists according to Seebeck effects, and the output electric potential is related to the heat flow density. Transient measurement on the heat flow density can be realized, and the thermal resistance-type thin film thermopile-type transient heat flow meter has the advantages of simple structure, small size, few influences on a measured field, quick response speed, large measurement temperature range and high measurement precision.
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Description

technical field

[0001] The invention relates to a heat flow meter in the field of micro-electromechanical technology, in particular to a thermal resistance film thermopile transient heat flow meter and a preparation method thereof. Background technique

[0002] Nowadays, in industrial and agricultural production, scientific research, aerospace, power engineering and daily life, there are a lot of heat transfer problems to be solved. With the rapid development of modern science and technology, it is far from enough to only use temperature as the only information for heat transfer. Therefore, more and more attention has been paid to the theory and technology of heat flow detection, and the research and use of heat flow probes and heat flow meters, which are sensors for measuring heat flow, have become more extensive. The thermal resistance heat flow meter is suitable for the measurement of steady-state heat flow, and the thin-film heat flow meter is suitable for the measureme...

Examples

Embodiment Construction

[0046] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0047] Such as figure 1 As shown, a thermal resistance thin film thermopile type transient heat flow meter, including: ceramic substrate 1, positive thermocouple 2, negative thermocouple 3, thermocouple connection layer 4, outer thermal resistance layer 5 and inner thermal resistance layer 6 ,in:

[0048] The positive thermocouple 2, the negative thermocouple 3, the thermocouple connecting layer 4, the outer thermal resistance layer 5 and the inner thermal resistance layer 6 are all arranged on t...